AVACO

- High quality PVD and etch process on substrate size from 200mm to 300mm

- Ultra-pure metal film manufacturing system that strictly controls semiconductor film properties

- Flexible system that combines various process chambers to enable multi-step processes for specific applications

- Available up to nine process chambers including optional multi-degas and precleaning

- Demonstrates high reliability and provides more CoO benefits

- Measure and analyze the defect image by receiving location coordinates of defects from the macro inspection system

- Measure the defect image using a high magnification lens

- Detect defects to the um level by applying the inspection function

- Bright field and dark field review available

- Measure and analyze the defect image by receiving location coordinates of defects from the 3D inspection system

- Measure the defect image using a high magnification lens

- nm level shapes can be detected by applying the 3D inspection function

- 3D mapping and review available