▉Overview
TSURUGI-C²® 剱® is KOKUSAI ELECTRIC CORPORATION’s new thermal processing platform which is most recently developed for advanced devices especially for the ones with high aspect ratio 3D structures requiring high quality, uniform and conformal film deposition with new innovative reactor design and process techniques.
▉Process Applications
・Thin film deposition
▉Features
・New innovative reactor design
-Provides thickness uniformity improvement with least loading effect
-Shorten total cycle time with dramatically improved reaction gas purging
・Low particle & High speed wafer transfer automation
・High productivity, Small footprint