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centrotherm clean solutions GmbH

Blaubeuren,  Germany
http://www.centrotherm-cs.de
  • Booth: D122

Overview

centrotherm clean colutions, now united with Busch Vacuum Solutions and Pfeiffer Vacuum under the umbrella of the new Busch Group, is a leading global supplier of equipment and technology for the treatment of gaseous, liquid, and solid pollutants with the goal of protecting the environmental health and safety of others. Customer satisfaction is the most important benchmark for us. We successfully treat the most difficult abatement processes worldwide. with more than 60 years of providing our customers with sustainable exhaust gas solutions, we have the expertise you need for your abatement challenges. From large volume VOC treatment to PoU treatment for Semiconductor, PV, FPD, LED, and R&D, we have the perfect solution. Engineered and manufactured in Germany with support locations worldwide.

  Products

  • Thermal Gas Treatment
    In thermal gas treatment, harmful gases are broken down at very high temperatures and scrubbed in the downstream wet stage. We have three different thermal systems using different fuel source in our product portfolio....

    • Burn-Wet Scrubber CT-BW

    Fuel source: CH4, Propan, Hydrogen…etc

    High destruction and removal efficiency (DRE)  – especially for climate-damaging PFCs

    Reliable disposal of particles and gaseous by-products

    Safe and media-saving operation under challenging process conditions

    Thermal-Wet Scrubber CT-TW

    Fuel source: electric heater

    Reliable disposal of flammable waste gases and gaseous by-products

    Lower installation costs (no fuel gas and oxygen required)

    Plasma-Wet Scrubber CT-PW

    Fuel source: Plasma source

    Suitable for waste gas treatment from CVD and etching processes

    Reliable disposal of praticle and gaseous by-products
  • Wet Scrubber
    In the wet scrubber, water-soluble harmful substances in the waste gas are washed out and transferred to the liquid phase....

    • Suitable for treating waste gases from various applications including etching and EPI processes
    • Efficient and cost-effective treatment of HCl, HF, SiH2Cl2, SiCl4 and NH3 along with other acidic and alkaline waste gases
    • Low operating costs due to minimal fresh water consumption
  • Dry Bed Absorber
    In the dry bed absorber, harmful gases are converted into non-volatile, inorganic solids that are permanently bound to the granules....

    • Easy installation and requires only electricity and compressed air or nitrogen for the operation.
    • Dry bed absorber as a passive system ensures continuous disposal of waste gases even in the event of a power failure.
    • Granules specifically developed for semiconductor and photovoltaic applications guarantee safe disposal of harmful gases.
  • Particle Filter System
    The particle filter system is a field proven technology for the semiconductor and photovoltaic industries. It effectively captures fine dust, reduces significantly the expenditure for cleaning of the facility exhaust and provide dust-free air....

    • High performance filters with a particle removal efficiency of > 99,95%
    • Automatic cleaning of filter elements during operation.
    • Low operation and maintenance requirements, very service friendly.

Categories

207 Equipment, Process
  • Cleaning; Washing; Drying Equipment for Substrate, Fab Processing
    • 500 Factory Monitoring & Control Systems (FMCS)
  • Waste Control; Effluent Management Systems (Fluid & Gas; Exhaust Conditioning; Scrubbers)
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