"SPADER™" is our pressure control product that integrates technology and solutions to meet your needs.
It provides vacuum environments and high-performance pressure control for semiconductors, displays, chambers, wafers, and clean rooms.
◎ Type
- STV A : Controller Integrated
- STV B : Controller Separated
* Option : High speed(0.1sec), Heating
◎ Adventages
◇ Superior Control
– Specially optimized control algorism
– Noise free (EMI suppression filter to input signal)
– Encoder-based precies & actual position control
◇ High Speed Control
– Speed : 0.5 sec (Open-Close)
◇ High Torque
– High torque(971 in-oz) direct gear drive motor
◇ Realtime Multi Sync
– Multi valve position synchronization
– Offset or ratio applicable
◇ Dual Gauge
– 1.4A ±15V DC power for two pressure sensors
◇ Interlock I/O
– Dry contact I/O (2 digit input, 2 digit output)
– Cable unplug detection function@STVB series
◇ Temp Monitoring
– Internal temperature detecting fuction
◇Communications
– RS485, DeviceNET, EtherCAT
◎ Specification
|
item
|
unit
|
Specification
|
|
Opening diameter
|
mm
|
100
|
|
Input power required
|
–
|
24VDC @<120W Max.
|
|
Valve operated
|
–
|
PID, Position, Auto tuning, Sync(Master/Slave)
|
|
Speed (Open to close)
|
sec
|
0.1
|
|
Resolution (Valve position)
|
–
|
1/5,000
|
|
Output torque
|
In-oz
|
347
|
|
Control repeatability
|
%
|
±0.1 of F.S
|
|
Pressure gauge power output
|
–
|
±15VDC @ <1.4A max.
|
|
Communications
|
–
|
RS485, DeviceNet, EtherCAT
|
|
Operating Temperature (Valve body)
|
℃
|
≤150
|
|
Operating Temperature (Ambient)
|
℃
|
≤50
|
|
Differential pressure
|
psig
|
15
|
|
External leakage at shaft seal
|
scc/sec He
|
1.0E-08
|
|
Flapper type
|
–
|
Non-sealing
|
|
Flapper gap
|
mm
|
0.05
|
|
Drive method
|
–
|
Direct gear drive
|
|
Encoder based actual position control
|
–
|
Provision
|
|
Cable unplug detection
|
–
|
Provision
|
|
Butterfly to shaft separated
|
–
|
Provision
|
|
Exposed material (Body)
|
–
|
Provision
|
|
Exposed material (Shaft,Plate,Crews)
|
–
|
Provision
|
|
Exposed material (Shaft seal)
|
–
|
Provision
|