To carry out semiconductor manufacturing processes, it is essential to maintain production equipment under vacuum conditions, which is achieved using a Vacuum Pump.
Additionally, the gases and chemicals used in semiconductor manufacturing are harmful to both the environment and human health, necessitating the use of an Abatement System (P.O.U Scrubber) for proper treatment.
While semiconductor manufacturing equipment is becoming increasingly compact, Vacuum Pumps and Abatement Systems are growing larger to meet process requirements and emission regulations.
By integrating the Vacuum Pump and Abatement System, TOS minimizes dead space, maximizes thermal efficiency, and achieves Minimized Footprint and High Performance.