•The Air connection parts of the Ozonizer and the mixing parts of Ozone are applied by Quarts (Splendor Method) or Teflon(Membrane Dissolution Method), Actualized the Minimalizing of the Metal Contamination.
•Excellent Control Capability of the Ozone Conc. : ±5% of Full Scale (depends on the control method)
•Diverse Model of Line-up, Customized Design.
•Simple Makeup, Actualized Simplification of Maintenance and the Minimalizing of the Costs.
•Possess a number of semiconductor cleaning equipment applications