KO-NICS CO.,LTD

Anseong-si,  Gyeonggi-do 
Korea (South)
http://www.ko-nics.co.kr
  • Booth: P304

Ko-nics specialises in ceramics for semiconductor.

Overview

Ko-nics has an ability like

- In-house material production technology / CIP & SLIP CASTING in-house production → Able to respond to customer requested materials

- Reduced processing time through green processing for each item → Possess technology to reduce cost and lead time

- Self-development of new materials and customer-requested materials through our own R&D

institute → Possession of R&D facilities to enhance our own competitiveness

- Machining : Possession of more than 20 MCT machines enables development, emergency response, and mass production

- In-house quality control through full inspection with 3D & non-contact measuring devices as quality maintenance technology

- Each executive has more than 20 years of CERAMIC field

- One-stop processing facility through processing and quality based on in-house material production capacity : Material production capacity to produce CIP up to Φ1000 or more, and slip casting length of 4000mm or more.

- Systematic production through our own production management system MES

- Maintaining the highest quality by conducting material characteristic inspection every quarter through R&D facilities

  Products

  • Moer ring Set
    It is made by manufacturing powder granules by cold hydrostatic pressure method like filling powder into a mould suitable for the product group, and molding by applying the same pressure to the powder from all directions. ...

    • • Item : Moer ring Set (120° hole)
    • Dimension : ∅ 445 x 3.8T
    • Material : AL2O3 & Sapphire
    • Method of construction : CIP (Cold lsostatic press)

    Sintered ceramic materials are polished with diamond-coated tools when processing, so the processing time is much longer than that of other materials because it has high strength due to their characteristics.

    In order to be competitive, KO-NICS has developed a technology to reduce processing costs by considering shrinkage rates in advance for gas hole processing by performing green processing of CIP molded bodies before sintering.

    [ Usage ]

    Cover the edge of the wafer, and uniformly flow the backside gases from the bottom to the top through the side hole of the ring to perform a uniform tungsten process.

    [Competitiveness ]  

    • Securing price competitiveness by shortening processing time through green processing
    • Realizing upward leveling of quality
    • Short lead time and mass production possible through securing a batch production system            
  • SYM3 CERAMIC LID & Y2O3 NOZZLE
    It is made by manufacturing powder granules by cold hydrostatic pressure method like filling powder into a mould suitable for the product group, and molding by applying the same pressure to the powder from all directions....

    • • Item : SYM3 CERAMIC LID & Y2O3 NOZZLE
    • Dimension : ∅ 445 x 3.8T &
    • Material : AL2O3 & Y2O3
    • Method of construction : CIP (Cold lsostatic press)

    KO-NICS has large-scale CIP manufacturing technology, so we can manufacture up to Φ 1000.

    [ Usage ]

    • It is used in the ICP Chamber System for Ceramic LID and Poly Etch.
    • It is located under the antenna that applies RF power and plays a role in ensuring that the chamber is well vacuumed.
    • It is located at the upper center of the Nozzle Chamber and achieves the target etching rate through uniform flow of etching process gas.

    [ Competitiveness ]  

    • Integrated production system from material production to precision processing, cleaning, and verification
    • Optimal leakage during raw material production to secure price competitiveness through cost reduction
    • Mass production possible
    • Optimized for customer needs and purposes and capable of diverse development
  • Speed dome
    It is made by manufacturing powder granules by cold hydrostatic pressure method like filling powder into a mould suitable for the product group, and molding by applying the same pressure to the powder from all directions....

    • • Item : Speed dome & DPS Metal , Poly & Cylinder 등
    • Dimension : ∅ 508 x 276.86T
    • Material : AL2O3
    • Method of construction : CIP (Cold lsostatic press)

    It is used in the HDP process among CVD Process Chambers. It acts as a vacuum chamber that receives RF power to form a uniform CVD HDP film on the wafer.

    [ Competitiveness ]  

    • Manufacture for all finished products like Ceramic Dome, RF Coiling line, and silicone cover
    • Ceramic Dome achieves high-quality Uniformity (uniformity, sameness)
    • After sale service available after sales and use (Repair)

  • Pez ring
    It is made by manufacturing powder granules by cold hydrostatic pressure method like filling powder into a mould suitable for the product group, and molding by applying the same pressure to the powder from all directions....

    • • Item : Pez ring / Upper, Lower
    • Dimension : ∅ 508 x 276.86T
    • Material : AL2O3
    • Method of construction : CIP (Cold lsostatic press)

    Y203 is a material that is very resistant to plasma as well as rare earth element, it also has a high unit price. It is possible to manufacture the material by over-assembling the Y203 powder within itself.

    In the Bevel Etch process, it is mounted on the ESC side where the Process Wafer goes up to protect the Wafer and focus the Plasma to form a uniform Etching Rate. In particular, it induces uniform etching of the Edge area, which is the end of the Wafer.

    [ Competitiveness ]  

    • Securing the production of Yittria materials that are optimal for the product's application

    : Plasma resistance / High strength / High density / Particle Free

    • Securing mass production system, stable production through planned production
  • Conductive ceramic
    It is made by manufacturing powder granules by cold hydrostatic pressure method like filling powder into a mould suitable for the product group, and molding by applying the same pressure to the powder from all directions....

    • • Item : Conductive Ceramic (PRODUCT GT FORK ARM)
    • Dimension : ∅ 358 x 139.7 x 4T
    • Material : AL2O3 + TiO2
    • Method of construction : CIP (Cold lsostatic press)

    Conductive ceramics are used to transport and support wafers in high temperature or high vacuum environments.

    ATM, Vacuum Robot's Blade (ARM) is used to individually transport wafers.

    Friction causes microscopic static electricity to be generated, and the resulting sliding phenomenon causes the wafer to move out of its proper position.

    Applying conductive ceramic to ground static electricity and prevent sliding of the wafer.

    [ Competitiveness ]  

    • Meeting customer needs with specific resistivity control
    • Adjusted and improved product shape to best suit the intended use

Categories

300 Materials, Assembly
  • Packages; Ceramic and Other High Temp Compounds
    • 307 Materials, Process
  • Deposition/Target Materials
  • Quartz ware (Silicon Carbide, Fused Quartz Glass, Sapphire), Ceramic & Oxide Ceramic Fixtures
    • 700 Manufacturing Services
  • Deposition Service
  • Etch; Strip; Cleaning Service
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