RFPT promises will be the best RF Plasma solution provider
Overview
RFPT Co., Ltd. was established in 2010
and is a company that provides high-frequency RF power solutions for plasma required for essential processes such as plasma etching/deposition/polymerization,
a core process of semiconductor manufacturing, based on RF and microwave (MW) technology.
It is leading the localization of the technology in the semiconductor and defense sectors, and has global semiconductor manufacturers such as
Samsung Electronics, Wonik IPS, ASM, and TEL as major customers.
1. RF Line-up
RF Generator / RF Matcher / RF Blocking Filter / RF VIZ Sensor / TTMS / ESC Power
2. MW Line-up
MW Autotunner Series of the S-TEAM
3. Htc Vacuum Valves Line-up
Vacuum Gate Valves / Vacuum Angle / Inline / Poppet Valves
Vacuum Butterfly Valves / Pressure Control Valves / Vacuum Pendulum Valves
Vacuum Venting Valves / All-Metal Valves / Vacuum Slit / Transfer Valves / Low Vibration Valves
Vacuum Ball Valves / Vacuum Check Valves / Aluminum Alloy Angle Valves
Teflon Coating Valves / Vacuum Valves Repair / Overhaul / Side-Driven Gate Valves
All-In-One Aluminum Angle Valves /Fast Shut Down Valves / Soft Vent / Pump Down Valves
Vacuum Chambers Design and Manufacture