DAS ENVIRONMENTAL EQUIPMENT KOREA LTD.

Hwaseong-si, Gyeonggi-do,  Korea (South)
https://www.das-ee.com/ko/
  • Booth: B632

Overview

Clean Air and Clean Water for Industries All Over the World

The responsible approach to the use of air and water, our vital resources, is one of the global challenges of our time. Since 1991, DAS Environmental Expert has met this challenge with targeted investments into future-oriented technologies for waste gas abatement and wastewater treatment.

In this spirit, we place the highest expectations on our development and production, and on all of our partners at our branch locations. We share our company’s success with our employees and the world-at-large.


  Products

  • SALIX
    The wet scrubber SALIX has been designed for new requirements in wet clean technologies in the semiconductor industry. The system reliably treats isopropyl alcohol (IPA), ammonia and hydrogen fluoride from waste gases from single wafer clean tools....

  • Operating Principle of the Wet Scrubber System SALIX

    The waste gases are fed by up to twelve separate inlets into pre-scrubber using spray nozzles which eliminates any clogging at the input. The waste gases pass into the first scrubber stage and flow upwards through the first scrubber column filled with packing material. The column is supplied with the scrubbing liquid via spray nozzles. Due to the large surface of the packing material and the counter flow principle the optimal absorption of the waste gases is possible.

    In the second stage a different scrubbing liquid is used. A demister is used to prevent the liquids from the two stages from mixing. The second scrubbing liquid allows an alternative chemistry to be used and so optimise the scrubbing of the waste gases. Ingredients of waste gases, which have not reacted in the first scrubber stage, can be better absorbed in the second scrubber stage. After the deposition of residual moisture of the gas flow in a demister the residual gases meet the strict standards of German air pollution law (TA Luft).

    Technical Data

    • Dimensions (W x D x H) SALIX: 3207 mm x 1250 mm x 24 mm
    • Dimensions (W x D x H) SALIX MINI: 1500 mm x 1530 mm x 1700 mm
    • Gas Entry: max. 12 x DN 150
    • Gas Outlet: DN 300 — 450
  • TSUGA
    TSUGA is the stand-alone bay solution for post combustion waste gas treatment for NOx and particulate matter in the semiconductor industry....

  • Functioning principle of the Selective Catalytic Reduction and Membrane Filter

    DeNOx: SCR (Selective Catalytic Reduction) with Ammonia

    • High reduction efficiency regardless NOx source: up to 95% *
    • Low NH3 slip: 10 ppm by precise control of the dosed reducing agent *
    • Flexible solution for NO and NO2 in broad concentration ranges up to 4000 ppm at total volume flow of up to 5000 slm
    • Low energy demand: low temperature process and energy recovery by heat exchanger

    DeDust: Membrane Filter (Surface Filtration)

    • Necessary pre-treatment for catalyst
    • High reduction efficiency of PM2.5, PM10, total dust fraction (up to 99.9%)
    • Applicable for typical post-combustion PM pollutants

    * Tradeoff between NOx DRE and NH3 slip: Increase of DRE will result in increase of slip and vice versa.