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RENA Technologies GmbH

Gütenbach,  Germany
http://www.rena.com
  • Booth: A354

Welcome to RENA Technologies!

Overview

RENA Technologies – The art of wet processing

RENA is a worldwide technological leader for wet-processing equipment. We provide the most valuable, innovative wet-chemical solutions for clients to reach the next level of state-of-the-art. For the semiconductor, renewable energy, glass, medtech and additive manufacturing sectors we manufacture highest-quality flexible and high-throughput equipment.

For SEMICON Korea we work together with Woowon Technology – our partner and representative in South Korea.

RENA has 4 manufacturing sites, 2 innovation hubs, and more than 3,300 machines installed worldwide. We are constantly developing the most efficient process for our clients to achieve perfect surface quality. With more than 130 engineers, 150 global service experts at 20 service locations we work to make RENA machines a long-term success story.

For more information, visit https://www.rena.com

  Products

  • BatchGlass Panel Processing Tool
    Pilot and Production Platform | Fully automated Platform | Through Glass Via (TGV) Processing Equipment...

    • Advanced Alkaline Processing Platform for Glass Panels

    Features and benefits

    • Processing of large format panels such as 510x515 mm
    • Optimized tank design and flow for excellent homogeneity of etching
    • Optimized footprint, modular design, and high cleanroom capabilities
    • 24/7 operation and easy upscaling of process
    • Highest surface cleanliness and with optimized pre and postcleaning
    • FOUP-to-FOUP Processing
    • GEM300 MES standard
    • SEMI standard compliant
    • Pilot Line and HVM suited
  • BatchGlass Lab Tool
    Lab and Pilot Platform | Semi-automated Platform | Through Glass Via (TGV) Processing Equipment ...

    • Advanced Alkaline Processing Platform for Glass Panels

    Features and benefits

    • Processing of large format panels up to 600 x 600 mm
    • Optimized tank design and flow for excellent homogeneity of etching
    • Optimized footprint, modular design, and cleanroom capabilities
    • 24/7 operation and easy upscaling of process
    • Highest surface cleanliness and with optimized pre and postcleaning
    • Optional MES and automation compatibility
    • Ideal for pilot and development lines

    Find more details on this platform by checking our product website.

  • BatchW
    Fully automated Processing Platform...

    • Features and benefits

    • Precision - perfect process monitoring for tight process control

    • Flexible adjustment to specific production specifications

    • Full compliance with the SEMI standard

    • Processing with and without carriers

    • High throughput 

    • Flexible loading/unlaoding solution (SMIF, FOUP, Open Cassette, interface to OHT/Stockers/AGV)

    For more details on this platform check out our product website.

  • ACE
    Single Wafer Tool...

    • Features and benefits

    • SiC Etching  

    • Single Clean between CMP & Epi

    • Prevent Wafer Breaks

    • Minimize Material Loss

    • Reduce CMP Depth
  • Revolution+
    Semi-automated wet bench for multi-step processes...

    • Features and Benefits

    • Dry-to-Dry Capabilities
    • 100mm up to 200mm wafer sizes
    • IDX Flexware Control Software
    • Multi-Step Sequences
    • Multiple Proprietary Technologies
    • HMI Touchscreen
    • Robust Rotary Robot
    • SECS/GEM Interface Options
    • Mini-environment as option
    • Stainless-steel version for Solvent application
    • Flexible and Upgradeable
    • Tailored to Customer Specification
    • Reduced Chemical & DI Water Usage
    • Lower Facility Costs
  • SST
    Spray Solvent Tool...

    • Features and Benefits

    • Reduced medium consumption 
    • Optimized footprint
    • Single or dual cassette handling
    • Highly serviceable, easy access 
    • SECS/GEM Interface Options
    • Flexible and Upgradeable
    • Improved operator user safety

Categories

200 Equipment, Assembly
  • Cleaning; Washing Equipment for Assembly & Packaging
  • Plating; Electro Chemical Plating for device assembly
  • Printing Equipment; Screen-printing; Alignment ; Film Printing
    • 207 Equipment, Process
  • Cleaning; Washing; Drying Equipment for Substrate, Fab Processing
  • Coat; Develop; Resist Processing; Track Equipment
  • Etching; Stripping; Ashing - Dry and Wet Equipment
  • Plating; Electro Chemical Plating; Deposition Systems
    • 306 PV Materials
  • Consumables
    • 308 Materials, Substrate
  • Compound Semiconductor substrates (GaAs on Silicon; GaN; InP; SiGe, etc.)
  • Gallium Arsenide (GaAs); Sapphire Substrates
  • Prime; Polished; Mirrored Wafers
    • 701 Manufacturing Services or Consulting
  • Assembly
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