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RENA Technologies GmbH

Gütenbach,  Germany
http://www.rena.com
  • Booth: A354

Welcome to RENA Technologies!

Overview

RENA Technologies – The art of wet processing

RENA is a worldwide technological leader for wet-processing equipment. We provide the most valuable, innovative wet-chemical solutions for clients to reach the next level of state-of-the-art. For the semiconductor, renewable energy, glass and medtech sectors we manufacture highest-quality flexible and high-throughput equipment.

For SEMICON Korea we work together with Woowon Technology – our partner and representative in South Korea.

RENA has 3 manufacturing sites, 2 innovation hubs, and more than 3,350 machines installed worldwide. We are constantly developing the most efficient process for our clients to achieve perfect surface quality. With more than 100 engineers, 150 global service experts at 20 service locations we work to make RENA machines a long-term success story.

For more information, visit https://www.rena.com

  Products

  • BatchGlass P3 | Production Tool
    Fully automated Platform...

    • Through Glass Via (TGV) Processing Equipment 

    High-end Advanced Production Platform for Glass Panels

    Features and Benefits

    • Processing of large format panels such as 510 x 515 mm² and 310x310 mm²
    • Suitable for etching and cleaning processes (combinations possible)
    • Optimized tank design and flow for excellent homogeneity of etching
    • Optimized footprint, modular design, and high cleanroom capabilities
    • 24/7 operation and easy upscaling of process
    • Highest surface cleanliness and with optimized pre and postcleaning
    • FOUP-to-FOUP Processing
    • SECS/GEM300 MES standard
    • SEMI standard compliant
    • Pilot Line and HVM suited
  • BatchGlass Lab
    Semi-automated Platform...

    •  Through Glass Via (TGV) Processing Equipment 

    Advanced Processing Platform for Glass Panels

    Features and Benefits

    • Processing of large format panels up to 600 x 600 mm² especially for all standard formats
    • Suitable for etching and cleaning processes (combinations possible)
    • Optimized tank design and flow for excellent homogeneity of etching
    • Optimized footprint and modular design
    • 24/7 operation and easy upscaling of process
    • Highest surface cleanliness and with optimized pre and postcleaning
    • Full MES and automation compatibility 
  • Convergence
    Fully automated Processing Platform...

    • Features and Benefits

    • Dedicated versions for 200 and 300 mm
    • Precision - perfect process monitoring for tight process control
    • Fully customizable to any customer specification or wish
    • Full compliance with the SEMI standard
    • Carrierless or LMC processing
    • High throughput 
    • Up to GEM300 compatible
    • Stainless-steel version for Solvent application
  • Revolution+
    Semi-automated wet bench for multi-step processes...

    • Features and Benefits

    • Dry-to-Dry Capabilities
    • up to 200 mm wafer
    • Multi-Step Sequences with parallel processing
    • SECS/GEM compatible
    • Low footprint
    • Up to 125 wph
    • Optional FFUs
    • EFEM Versions available
    • Stainless-steel version for Solvent application

Categories

200 Equipment, Assembly
  • Cleaning; Washing Equipment for Assembly & Packaging
  • Plating; Electro Chemical Plating for device assembly
  • Printing Equipment; Screen-printing; Alignment ; Film Printing
    • 207 Equipment, Process
  • Cleaning; Washing; Drying Equipment for Substrate, Fab Processing
  • Coat; Develop; Resist Processing; Track Equipment
  • Etching; Stripping; Ashing - Dry and Wet Equipment
  • Plating; Electro Chemical Plating; Deposition Systems
    • 306 PV Materials
  • Consumables
    • 308 Materials, Substrate
  • Compound Semiconductor substrates (GaAs on Silicon; GaN; InP; SiGe, etc.)
  • Gallium Arsenide (GaAs); Sapphire Substrates
  • Prime; Polished; Mirrored Wafers
    • 701 Manufacturing Services or Consulting
  • Assembly
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