Trelleborg Sealing Solutions debuts a new range of fluorosurfactant-free seals designed to reduce environmental impact at Semicon Korea 2026, at booth C668, COEX, Seoul, Korea, from February 11 to 13.
As global regulators and semiconductor manufacturers increasingly focus on reducing per- and polyfluoroalkyl substances (PFAS) due to their potential impacts on human health and the environment, Trelleborg launches three new Isolast® PureFab® materials; two per-fluoroelastomers (FFKMs) JPF50 and JPF58, and fluoroelastomer (FKM) VPF20.
Chris Busby, Global Segment Director Semiconductor, says: “These new high-temperature FFKMs and FKM are ‘fluorosurfactactant free’, meaning they are made without low-molecular-weight PFAS fluorosurfactants for reduced environmental impact.
“Their introduction helps semiconductor customers future proof their sealing solutions against regulation seeking to reduce or eliminate PFAS while reducing their product’s environmental impact, without any compromise on the materials’ performance and durability. We invite any interested customers to meet us at Semicon Korea for a discussion and to arrange samples for testing.”
Isolast® PureFab® JPF50 is a high-purity FFKM manufactured without fillers which extends service life and increases yields, meeting the demanding requirements of the semiconductor industry.
Isolast® PureFab® JPF58 is a high-temperature FFKM delivering purity and performance in challenging semiconductor applications to extend service life.
PureFab® VPF20 - a high-purity FKM - is specifically designed for contamination-free production in semiconductor and flat panel display manufacturing where purity is critical.
The entire range of Trelleborg semiconductor solutions is designed to perform and prevent premature failure in the extreme temperatures and more aggressive chemical precursors increasingly characterizing semiconductor environments.
“As a Trelleborg customer you benefit from premium engineering capabilities to develop the right custom solutions for today’s increasingly extreme fab and sub-fab environments, including the unique ability to model compression set data using finite element analysis (FEA),” adds Busby. “A step change in technology, our advanced FEA provides engineers with more accurate predictions of a seal’s usable lifetime as they design and manufacture finished products. Booth visitors at Semicon Korea can learn more about the benefits at our digital FEA display.”
Trelleborg will showcase its entire Isolast® PureFab® range at the show, providing excellent performance in aggressive front-end processes including deposition, etch, ash/strip, plasma cleaning and thermal processing such as atomic layer deposition.
One highlight of the Trelleborg Isolast® PureFab® portfolio is JPF44, a high-temperature FFKM with 75 Shore A hardness, which operates at up to 325 °C/617 °F. Engineered for extreme temperature sealing in thermal and subfab process environments, it has excellent chemical resistance to reactive gases like NF₃, O₂ and CF₄.
JPF44 features superior compression set resistance, even after extended thermal cycling, and is ideal for RTP, high-temp CVD, diffusion furnace tools and vacuum pumps. It has low outgassing and relatively high purity, minimizing particle generation and contamination, and offers reliable long-term sealing, reducing tool downtime and preventative maintenance frequency.
Also featured are bonded slit valve door seals for wafer transfer chambers, offering significantly higher performance than conventional O-Rings. Comprised of dynamic rubber-to-metal bonded seals, they are characterized by a longer lifespan and a much more reliable sealing performance. Thanks to their extremely low particle generation and high durability, costly downtime and maintenance intervals are minimized. Naturally this reliable product meets all semiconductor industry standards.
Another solution on display is the Turcon® Variseal® NW. The Turcon® case of the flange seal encompasses an energizing spring that eliminates the possibility of contact between the spring or spring cavity and system media. It is ideal for semiconductor applications where it can successfully operate in a vacuum and is proven in fluorine gas.
At the show Trelleborg will also debut a new solution to complement elastomer bands which traditionally protect the interface adhesive layer between the ceramic and aluminum layers of electrostatic chucks (ESCs). ESCs are a specialized type of chuck that uses electrostatic force to chuck, hold down or pick up objects, typically used in etch and deposition chambers for fixing thin, delicate silicon wafers.
Manufactured from high-purity Isolast® PureFab® FFKM or Turcon® PTFE compounds, Trelleborg’s ESC chuck seal solutions significantly increase life expectancy, protecting the outside diameter of the ESC from plasma erosion. It is available in elastomer (FFKM) versions and a PTFE design for low-temperature cryogenic etch applications.
Caption: Isolast® PureFab® JPF50 is a high-purity FFKM manufactured without fillers or fluorosurfactants which extends service life and increases yields, meeting the demanding requirements of the semiconductor industry.
For more information, please contact:
Paul Ravenscroft
Tel: +44 (0) 7890 419312
Email: [email protected]
About Trelleborg Sealing Solutions and Trelleborg Group
Trelleborg Sealing Solutions combines deep materials and applications expertise with close customer collaboration to fulfil our mission as a leading provider of precision seals, bearings and custom polymer components. We focus on meeting the most demanding needs of aerospace, food and beverage, semiconductor and general industrial customers. With a strong emphasis on local engineering, manufacturing and supply capabilities, we support our customers working side by side to deliver tailored solutions for their specific needs. Our global network of over 35 production facilities, more than 55 Customer Solution Centers and 15 R&D centers ensures responsive support and seamless cooperation at a local level. Through innovative products, proprietary materials and a commitment to excellent service, we empower customers to achieve their goals, locally and globally.www.trelleborg.com/seals
Trelleborg leverages in-depth materials and applications expertise with early market insights, making the Group a world leader in engineered polymer solutions. We offer a unique portfolio covering a broad range of applications – even the most complex ones. In 2024, Trelleborg Group reported annual sales of approximately SEK 34 billion, with operations in around 40 countries. The Group comprises three business areas: Trelleborg Industrial Solutions, Trelleborg Medical Solutions, and Trelleborg Sealing Solutions. The Trelleborg share has been listed on the Stock Exchange since 1964 and is traded on Nasdaq Stockholm, Large Cap. www.trelleborg.com