Kimura® is a unique range of fully organic elastomers ideally suited to thermal, dynamic and specific plasma processes where radical concentrations are generally lower, or where inorganic filler systems are undesirable.
The Kimura® range of high performance elastomer materials utilise a controlled molecular architecture which provides a unique self-reinforcing polymer structure, providing improved chemical resistance without the use of inorganic fillers of any kind. This high purity material breaks new ground in elastomer technology, developed specifically for aggressive chlorine and CxFy based semiconductor applications.
Kimura® elastomers span the range of fluoro and perfluoro (FKM and FFKM) materials and includes unique hybrid elastomers, specifically developed by PPE, for the semiconductor industry, to offer a step-change in sealing performance, suprassing what has previously been achievable for fully organic materials.
The high purity of the polymer combined with the absence of inorganic fillers makes Kimura® materials suitable for processes involving lower feature sizes.
Key material attributes
- Exceptionally pure - does not contain any inorganic fillers which may lead to particle generation
- High thermal stability
- Low thermal expansion - retro-fits existing O-ring grooves (including FKM and FFKM grooves)
- Low compression set for extended seal life
- Low permeation
- Low out-gassing
- Low adhesion for reduced sticking