Precision Polymer Engineering Ltd.

Blackburn, 
United Kingdom
http://www.prepol.com
  • Booth: 1304


Welcome to Precision Polymer Engineering!

Precision Polymer Engineering (PPE) manufactures innovative seals, O-rings, slit valve doors, wafer handling components and custom parts - delivering sealing solutions able to perform to the highest standards in aggressive semiconductor production environments.

Using the latest polymer technology, PPE seals are designed to provide excellent mechanical properties with extended high temperature performance, outstanding chemical and plasma resistance. Our ultra-pure organic elastomer grades do not contain carbon or metal fillers, reducing particle generation and minimising contamination. 

PPE will be showcasing its range of cost effective elastomer materials at SEMICON Southeast Asia, with each of our material families engineered to reduce the cost of consumables by whilst maintaining excellent levels of sealing performance.

See our latest materials at #1304, and put your questions to our semicon sealing experts!


 Products

  • Perlast® Perfluoroelastomers
    Precision Polymer Engineering has engineered a suite of high performance materials able to resist the challenges of thermal, plasma and wet chemical processes in critical semiconductor applications. One of these materials is Perlast®....

  • Perfluoroelastomer (FFKM) is the most chemically resistant elastomer available and is effectively a rubber form of PTFE. Perlast® perfluoroelastomers grades provide other properties which prove most valuable in critical sealing applications where purity and retention of sealing force are paramount.

    Features of Perlast® FFKM seals

    • High temperature stability up to 327°C
    • Almost universal chemical resistance
    • Outstanding mechanical properties
    • High purity for reduced process contamination

    Benefits of using Perlast® FFKM seals

    • Increased in-service seal lifetime
    • Improved sealing performance
    • Reduced process contamination
    • Reduced equipment downtime
  • Kimura®
    Kimura® is a unique range of fully organic elastomers ideally suited to thermal, dynamic and specific plasma processes where radical concentrations are generally lower, or where inorganic filler systems are undesirable....

  • Kimura® is a unique range of fully organic elastomers ideally suited to thermal, dynamic and specific plasma processes where radical concentrations are generally lower, or where inorganic filler systems are undesirable.

    The Kimura® range of high performance elastomer materials utilise a controlled molecular architecture which provides a unique self-reinforcing polymer structure, providing improved chemical resistance without the use of inorganic fillers of any kind. This high purity material breaks new ground in elastomer technology, developed specifically for aggressive chlorine and CxFy based semiconductor applications.

    Kimura® elastomers span the range of fluoro and perfluoro (FKM and FFKM) materials and includes unique hybrid elastomers, specifically developed by PPE, for the semiconductor industry, to offer a step-change in sealing performance, suprassing what has previously been achievable for fully organic materials.

    The high purity of the polymer combined with the absence of inorganic fillers makes Kimura® materials suitable for processes involving lower feature sizes.

    Key material attributes

    • Exceptionally pure - does not contain any inorganic fillers which may lead to particle generation
    • High thermal stability
    • Low thermal expansion - retro-fits existing O-ring grooves (including FKM and FFKM grooves)
    • Low compression set for extended seal life
    • Low permeation
    • Low out-gassing
    • Low adhesion for reduced sticking
  • Nanofluor®
    Nanofluor® elastomers can be considered as hybrid materials, bridging a gap between the low cost of fluoroelastomer (FKM) and high cost of perfluoroelastomer (FFKM) polymer types....

  • Nanofluor® elastomers can be considered as hybrid materials, bridging a gap between the low cost of fluoroelastomer (FKM) and high cost of perfluoroelastomer (FFKM) polymer types.

    The range includes a fully organic ultra-low outgassing material and an inorganic filled grade with unique nano-filler to reduce erosion rates. The nano-filled material provides a chemical inertness only seen in much more costly FFKM grades and been developed for plasma ash or resist strip, chlorine and CxFy based etch processes. 

    Nanofluor® grades provide some of the lowest trace metal contamination levels available from elastomer seals and ultra-low permeation rates.

    Key material attributes

    • Ultra pure with extremely low trace metal contaminants which may cause electrical yield problems
    • Excellent plasma resistance - ideal for most plasma chemistries, except high F-radical processes
    • Plasma resistance comparable or superior to many competative pure FFKM grades
    • Low coefficient of thermal expansion
    • Retrofits existing O-ring grooves (including FKM and FFKM grooves)
    • Low permeation
    • Low outgassing
  • Slit Valve Doors
    PPE provides a wide range of bonded Slit Valve Door designs coupled with an extensive range of high purity elastomer seals developed specifically for aggressive semiconductor sealing applications....

  • PPE provides a wide range of bonded Slit Valve Door designs coupled with an extensive range of high purity elastomer seals developed specifically for aggressive semiconductor sealing applications - extending life, improving performance and reducing total cost of ownership.

    Shaped non-bonded gate seals are also available in specific customised cross sections to improve fitment and reduce stress-related wear.

    PPE's range of slit valve doors includes flat and L-motion type bonded doors and MONOVAT gates, offering the ultimate in plasma resistance, reduced particle formation and long term reliable mechanical performance.

    Utilising a range of high performance elastomers, PPE's slit valve doors are designed to provide the highest sealing integrity, delivering improved yields, increased time between PM cycles and minimised particle generation. 

    Features of PPE Slit Valve Doors

    • Fit a variety of OEM platforms
    • Available with Perlast, Kimura and Nanofluor, our unique semiconductor-grade elastomers - minimising the potential for partical formation in plasma environments
    • Optimised seal designs to remove localised stresses, extending seal life
  • End Effector Pads
    High purity Perlast materials are widely used in wafer handling applications as end effector pads because they provide optimised friction to maintain wafer positional accuracy, and prevent particulation due to their wholly organic nature....

  • High purity Perlast materials are widely used in wafer handling applications as end effector pads because they provide optimised friction to maintain wafer positional accuracy, and prevent particulation due to their wholly organic nature.

    PPE are experts in providing elastomeric solutions and can help you optimise your designs using our materials expertise and advanced design tools, such as non-linear finite element analysis.

    Custom designed wafer handling components ensure improved pad retention into mating hardware, simplified assembly and optimum friction to allow fast robotic handling.

    The PPE range of materials includes elastomers with both low and high coefficients of friction, to allow tailoring of wafer retention force. In addition, PPE offers dissipative end effectors moulded from unique elastomer materials to reduce electrostatic discharge (ESD) damage.


 Additional Info

New Exhibitor:
No
New Products:
No
Displaying Equipment:
Yes
Product Demonstrations:
No
Please indicate which industries/technologies your company serves
Semiconductor