centrotherm clean solutions GmbH

Blaubeuren, 
Germany
http://www.centrotherm-cs.de
  • Booth: N601

Your reliable partner for smart environmental solutions

centrotherm clean solutions is a technology leading global supplier of equipment for the treatment of gaseous, liquid and solid pollutants for semiconductor and PV industry with the goal to protect the environment.

We focus on high-tech solutions for best customer satisfaction, state-of-the-art products with maximum efficiency and minimal operating costs. We provide high safety standards for the operators of our systems and find solutions to meet individual customer requirements.

Visit our website to learn more about us and our products.


 Products

  • CT-BW Bruner-Washer
    The CT-BW point-of-use abatement systems set global standards in waste gas abatement. They are highly efficient system used in CVD and etching applications for photovoltaic, semiconductor and related industries....

  • Highlights
    - Minimizing of operating costs due to process-dependent burner performance
    - Flexible system configuration - customized features to your process requirements
    - Destruction & Removal Efficiency (DRE) of up to 99.99%
    - Low maintenance costs with a high system availability of > 98%
    - Comprehensive safety features integrated as standard
    - Quality Made in Germany

    Applications
    - CVD processes
    - Etch processes
    - EPI processes
  • CT-D Dry-Bed Absorber
    The centrotherm CT-D dry bed absorber offers you a safe and efficient disposal of harmful gases which are used in the semiconductor and photovoltaic industry, without any special demands regarding your media supply....

  • Highlights
    - Low demand on media supply, long granulate lifetime
    - Minimal maintenance requirements
    - Patented absorber design with cold trap function prevents blockages
    - Available as 30 litres, 60 litres or 120 litres absorption module
    - Outlet concentrations guaranteed to reach TLV
    - Specifically designed granules for various applications
    - Chemisorption irreversibly binds hazardous gases to granulate
    - Minimum footprint
    - Easy and safe cartridge replacement and global refill service available
    - Quality Made in Germany

    Applications
    - R&D applications
    - CVD applications (e.g. MOCVD)
    - Etch processes
    - ALD processes
    - Ion implanters
    - CIGS
  • CT-W Wet Scrubber
    In wet chemical waste gas treatment, water soluble harmful gases from the exhaust air are transferred to the liquid phase through scrubbing....

  • Highlights
    - Destruction & Removal Efficiency (DRE) of up to 99.99%
    - Very effective dust separation
    - Low operating costs due to minimum fresh water consumption
    - Available operating time > 99% as well as easy and quick maintenance
    - Quality Made in Germany

    Applications
    - CVD processes
    - Etch processes
    - EPI processes

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