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SAT Group

  • Booth: A1154

Overview

SAT Group (SAT srl) is a company that manufactures equipment, components and spare parts for wet chemical process applications for the semiconductors, photovoltaics, laboratories, and solar industries.

Since 1987 we are expert in the lavoration and molding of various thermoplastic materials and we are able to offer our customers a wide range of products, such as:

  • Wet benches, glovebox, chemical distribution systems, chemical carts

  • Pumps (without metal parts) for the transfer of high purity chemicals and DIW

  • Tubing, valves and fittings made in PFA, PTFE, PVDF

  • Custom parts made in thermoplastic material, ceramic, and metal (reverse engineering available)

  • Installation, repair, and maintenance services on various tools and equipments


  Products

  • SAT130Plus Pneumatic Pump Ultrapure No-Metal parts
    “No Metal Parts” SAT130Plus pump, a pneumatic double bellows pump no-metal parts, made with ultrapure PTFE, PFA, ceramic that is suitable for pumping high purity fluids as acids, solvents and I.D. water....

  • All components of the SAT130Plus pumps are made of UHP PTFE, PFA, PVDF, CERAMIC and are also suitable for pumping corrosive chemicals such as: H2SO4, HNO3, HF, H3PO4, HCI, NH4OH, KOH, NaOH, CH3COOH, H2O2 etc, and no metal parts are used. All our suppliers are ISO 9001:2015 certified and qualified by SAT. 
  • ”SAT Full Automated” Wet Bench
    a dry-in/dry-out ultra-clean wafer etch, rinse, and drying system. It is designed to release the smallest possible number of particles, in order to avoid metallic or organic contamination....

  • SAT Full Automated Bench is equipped with a mini-environment and an automation system that is vibration-free, for obtaining the maximum yield in the operations of wet processing. The system is placed in the state-of-the-art equipment with high qualitative characteristics for the optimization not only of the processes, but also of the production flow. It improves the quality and efficiency of the processes of wafer etching, wafer-rinse and drying, increasing the throughput in wafer- processing. Drying system eco-friendly, exclusively NO- IPA.

  • SAT Chemical Distribution System
    SAT Chemical Delivery Systems provide outstanding performance, reliability, and are fully customizable for the customer's specific application....

  • The advantages of SAT CDS over the older methods, like canister and bottles, include: better safety, less spilling and not having to rinse bottles before recycling or return. Semiconductor fabs, Pharmaceutical and medical device are using this method and the advantages include:

    ● CDS can be custom made as per customer's design and requirements
    ● Full control impurity levels
    ● Improved safety
    ● Less cleanroom space due to space-saver designs
    ● Lower cost per unit volume of chemical
    ● Low cost in chemical handling
    ● Reduced container disposal costs
    ● SAT manufactures all the spare parts installed inside the CDS, including the pumps, which means very competitive prices of the equipment


    In the semiconductor fabs, the typical chemicals distributed by SAT CDS are:
    ● Organic solvents
    ● Process cleaning chemicals
    ● Photolithography chemicals
    ● Chemicals in general


    The safety using the SAT CDS include:
    ● Double back-up pump is installed, no risk of failure
    ● Secondary containment in supply lines is crucial to protect against leaks
    ● Returnable vessels are used to mitigate the hazards of cleaning and disposing of chemicals vessels
    ● Kit sensors Leak detection are installed inside the CDS and along the piping
  • "ASTRO" Single Spin Processor
    ASTRO, Single wafer spin processor is a highly flexible wet processing platform, Designed for multiple applications for the most advanced semiconductor fabrication facilities....

  • ASTRO, Single wafer spin processor is a highly flexible wet processing platform, Designed for multiple applications for the most advanced semiconductor fabrication facilities.

    Features:

    • Standard or customized design by customers' requirements
    • High throughput & Small footprint
    • Selective etching process for device-side or back-side
    • Non-drip function to prevent recontamination
    • Standby cleaning function to prevent crystallization of Dispenser inside
    • Chemical "Recycle" or "One-shot drain" with chamber cup separation
    • Provide various types of Spin Chucks (Grip Chuck, Bernoulli Chuck, Venturi Chuck, Vacuum Chuck)
    • Fully isolated wafer handling between before and after processing

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