TRI SEMI Inspection Functions |
Die Bonding | Missing, Orientation, Rotation, Shift, Tilted, Chipping, Crack, Scratch, Bond line thickness, Epoxy on Die, Epoxy Coverage, Epoxy Height |
Wire Bonding | Broken, Short, Sweep/Sink, Missing, Sway, Collapse, Loop Height Sagged Wire, Cross Wire Gap, Wire Tracing, Ball Bond Diameter Ball Placement, Stitch Width, Stitch Coverage over Ball Ball-off Pad, Ball touch Pad Distance, Clubbed Ball, Ball Thickness Lifted Ball, Low Landing, Bond on Contamination |
Bonding Area/Pad | Copper Protrusion, Crack, Chipping, Exposed Copper, Exposed Nickel, Target Material, Scratches or Brush Marks, Oxidation |
Molding / Underfill Materials (EMC, CUF, NCP, NCF, MUF) | Area coverage, Dimensions, Surface, Void, Damage, Crack, Scratches, Delamination, Contamination, Surface particles |
Patterned Wafer | Residues, Crack, Scratch, Particle, Pad Abnormal, Discolor, Contamination, Peeling, Probe Mark Defect, CD Measurement |
Bump Wafer | 2D Bump Size, 3D Bump Height, Bump Defect, Foreign Material, CD Measurement |
Wafer Frame | Chipping, Crack, Scratch, Particle, Contamination, CD Measurement, Saw 3D metrology |