Overview
A pie of electrostatic chucks that maximizes the power of static electricity and contributes to society Onier It's creative technology!
We are a manufacturer that designs, develops, manufactures, and sells electrostatic chucks, heaters, and sensors, and supplies them to the world. Regardless of the application, we are developing services that meet your needs.
We would like to introduce our main products.
We have been reproducing and manufacturing new electrostatic chucks that grip workpieces in a vacuum for many years.
We have electrostatic chucks in various materials such as polyimide, thermal spray, and ceramics, and wafer sizes of 4 inches ~ 12 inches are available. In addition to manufacturing and refurbishing new electrostatic chucks, we are also working to extend the life of ESCs. Our electrostatic chuck technology is trusted by many device manufacturers both in Japan and overseas. If you have any problems with electrostatic chucks, please contact us at any time.
We also offer anti-particle items. Our particle countermeasure products, such as cleaning wafers and particle collectors, have received many inquiries from customers who are troubled by foreign substances such as dust, dust, and dust. If you have any problems with particles, please contact us at any time.
The IonPad is a transport pad with a high gripping force.
The high adsorption power meets the needs of customers who have trouble transporting warped wafers.
Customers who had no choice but to reduce the transport speed in response to errors caused by misalignment of warped wafers that are difficult to transport and misalignment have been well received by implementing IonPad, which makes it possible to take measures against transport errors without reducing the transport speed. If you have any problems with wafer transportation, please contact us at any time.
Products