Turbopumps with 5-axis magnetic levitation
- Clean vacuum thanks to lubricant-free magnetic bearings
- Very high gas throughput for all process gases
- Outstanding long-term stability and reliability
- High backing pump compatibility
- High air ingress stability
- Low lifetime costs due to maintenance-free technology
- Freely selectable rotation speed in a broad RPM range for optimized process optimization
- Ultra-low noise and vibration
- Can be installed in any orientation