
Palomar's SST 5100 programmable vacuum pressure system achieved superior hermetic lid seal results by combining time, temperature and vacuum in a single chamber, single process method with Real Time Graphing of all Profile Runs. Using it's expertly tuned automated profiles and process expertise, Palomar's SST equipment and solutions can deliver very high-yield for high-reliability microelectronic devices. Typical end-market devices include those used in aerospace flight hardware, defense IR sensors, high-power industrial lasers and critical automotive sensing. The 5100 system also delivers exceptional void-free die attach capability by introducing over-pressure (pressure above atmospheric pressure) to the vacuum, temperature and time automated profile. The over-pressure is built into the automated profile process and introduced to force out voids in difficult applications, where <1% voiding is essential. Fluxless processes are also possible, and often necessary due voiding requirements and environmental regulations. In lieu of flux, SST will utilize formic acid or forming gas. All heating elements in SST systems are transmitted through graphite tooling using both radiant and resistive heating methods. The graphite tooling is precision-machined by SST and designed for the specific size, type, material composition and performance requirements of device being bonded or sealed. SST systems range in temperature from 450'C up to 1000'C, vacuum levels from 10^-4 to 10^-7 torr, and over-pressure up to 40 psig. An array of options including Getter Activitation, Residual Gas Analyzers, Moisture Level Recording, and UPH enhancers.