SHiNKO

  • Booth: 1927

Dry Cleaning System for Surface of Wafer & Flat materials

Overview

SHiNKO is specialized in Dry Surface Cleaning System. A wide range of customized cleaning system is available for Web as well as Flat materials and for different sizes & characteristics of particle. The system is free from maintenance and easily installed in the process where the particle removal is critical. Our main markets/ applications are those in relation with Films, Batteries, Display, Wafer, CMOS, Ceramic, Lens, Paper, Card board, Tire, Metal, Foil, Fiber, OLED, Ceramic, Non-woven, Fabric, Leather and so on.


  Products

  • SHiNKO Cleaner process module
    Cleaning Process module to clean wafer or flat substrates.
    Including a blower unit, FFU, PLC control, communication with EFEM....

  • Cleaning Process module to clean wafer or flat substrates.
    Including a blower unit, FFU, PLC control, communication with EFEM.
  • SHiNKO Cleaner process module + EFEM
    A complete process module unit including a master control & SECS/GEM
    ...

  • A complete process module unit including a master control & SECS/GEM
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