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SOLBERG Vacuum Filtration Solutions

Itasca,  IL 
United States
http://www.solbergmfg.com
  • Booth: 534

SOLBERG CREATES VACUUM FILTER SOLUTIONS FOR SEMI PROCESSES

Overview

Vacuum systems (pumps, filters, and other auxiliary equipment) are crucial for semiconductor and solar cell manufacturing processes including:  crystal growing, wafer fabrication, Chemical Vapor Deposition (CVD), and lamination.  These processes create by-products ranging from silicon particles to harsh chemical vapors, and when not captured, these contaminants will negatively impact the overall system performance and damage critical components, including the vacuum pumps. 

Solberg creates high-efficiency vacuum filtration solutions designed for specific semicon process requirements.  Purpose built filtration solutions will capture process contaminants, protect the vacuum pump, reduce maintenance costs, and maximize semiconductor tool uptime and product yields.  


  Products

  • Solberg WL Series Inlet Vacuum Pump Filter
    Solberg’s WL Series vacuum filters are designed for Semicon processes that require high efficiency and a verified leak rate. The WL Series includes ISO vacuum fittings and filter media options for pump protection in a variety of processes....

  • Solberg’s WL Series medium to high vacuum filters are designed for industrial and Semicon processes that require a verified leak rate and operate in medium to high vacuum conditions. The WL Series has various vacuum-specific connection options, including ISO vacuum fittings and numerous filter media options for superior protection and system longevity. Housings in this series are 100% helium-leak tested to ensure vacuum integrity with verified leak rates of 1x 10-5 mbar l/s or better.

    Solberg’s WL Inlet Vacuum Filter Series offers multiple configurations, including:

    • High-Efficiency Filtration
    • Chemical Adsorption
    • High-Temperature Materials of Construction  
  • RX Series Pulse Cleaning Vacuum Pump Filter
    The Solberg RX Series is self-cleaning filtration system that uses compressed air/gas to pulse clean a PTFE filter element loaded with collected dust. The RX increases service intervals, reduces maintenance, and maximizes process uptime....

  • Solberg's RX Series pulse cleaning inlet vacuum filter is ideal for continuous duty applications in which frequent manual service is not feasible.  Given the harsh and abrasive nature of the silicon dust, it is important to have the protection of a high-efficiency filter upstream of the vacuum pump.  Operators prefer to limit the manual handling, so the the integrated self-cleaning pulse feature of the RX Series, allows for cleaning without direct contact.

    These systems operate in conjunction with plant-supplied compressed inert gas (Argon, Nitrogen) or clean/dry compressed air to pulse clean the internal PTFE filter elements between process cycles. This feature extends the filter element's service interval and limits the operators' physical handling and exposure.

    Features and Options Include:


    • An internal filter cartridge manufactured with high-efficiency PTFE media (99.5%) offers the best dust release properties when pulsed.
    • Pulse controls, isolation valves, air/gas accumulator tanks, and removable collection containers are turnkey options that allow the operator to “plug and play.”
    • Various construction materials (carbon steel, stainless steel, etc.) are recommended based on the application conditions and site-specific requirements.
    • Various connection types (DN Flanges, ANSI Flanges, ISOK Flanges) and piping configurations (angled, straight through, tangential, etc.) to best match the process piping and vacuum pump inlet connection.
    • The RX design and size depends on specific process details, including charge weight, dust challenge (kg/hr), micron size, cycle time, and process flow rate. Sizing is important to ensure there is adequate filtration surface area for long life and increased conductance/decreased pressure drop.

  • JRS Vapor Condensing Vacuum Pump Filter
    Solberg’s JRS Series is a multistage vapor condensing filter designed to protect vacuum pumps from harmful process vapors and liquids that can contaminate the pump oil....

  • Vapor condensing is accomplished by transitioning a substance from a gaseous state to a liquid or solid state by passing air/gas through Solberg’s proprietary cooling technology. Our JRS Series will extend the vacuum pump life and reduce costly downtime.

    Soberg’s JRS Series Features and Benefits: 

    • Prevents vapor from contaminating the vacuum pump oil
    • Includes a removable heat exchanger pack for quick cleaning 
    • Can operate with a variety of coolants, including glycol and water
    • Drain port to empty the collected fluid
    • Autodrain systems available to allow for continous draining without any process vacuum interruptions
    • Final filter element option to adsorb residual vapors
  • HDL Oil Mist Exhaust Vacuum Pump Filter
    The HDL Series removes oil mist and aerosols from the discharge of an oil lubricated vacuum pump....

  • The Solberg HDL Series is a proven solution to safeguard work areas from environmentally hazardous oil mist and smoke vented from the discharge of an oil lubricated vacuum pump.  

    The HDL Series includes:

    • High efficiency oil mist coalescing filter element (99.997% efficient for 0.3 micron oil mist)
    • Rugged carbon steel construction with white powdercoat paint finish
    • Various oil oalescing filter element options
    • Drain port for oil recovery
  • SRS Liquid/Particle Separation Vacuum Pump Filter
    Solberg’s SRS Series is a heavy-duty multistage liquid and particulate separator designed to protect vacuum pumps from harmful contaminants....

  • The Solberg SRS Series is a turn-key solution configured for specific application requirements and contaminants (chemicals, water, particles, etc.).  Multiple internal filtration/separation options are available depending on the process conditions.  Auto-drain systems are available to empty the collected liquids while maintaining continous vacuum.   
  • DEE Oil Mist Exhaust Vacuum Pump Filter
    Solberg's DEE series is a highly effective vacuum pump exhaust filter that offers two stages of filtration to remove both oil mist and undesirable odors....

  • Solberg's DEE series is a highly effective vacuum pump exhaust filter that offers two stages of filtration to remove both oil mist and undesirable odors.  It offers a compact, straight-through piping design, with an integrated drain port, and back pressure relief valve.

    Features and Benefits:

    • Cleans the vacuum pump exhaust air by capturing and coalescing oil mist
    • Removes offensive odors
    • Allows for easy draining oil recovery with an integrated drain port
    • Proprietory design allows for easy servicing
    • Replacement filter element kits are readily available for fast filter change out and minimal downtime
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