Compitek Corp. Pte. Ltd.

AUTOMATED AI BATCH WAFER EDGE INSPECTION

EMU Technologies Batch Wafer Edge Inspection system combines our Batch ID Reader and Cognex InSight ViDi AI Inspection system to provide an ultra high-throughput and extremely versatile wafer edge inspection solution.

The equipment performs a batch align and read cycle to read lasermarks and/or datamatrix tags on each wafer.

The equipment then rotates wafers using the batch aligner for edge defect inspection using a Cognex D905 camera.

An algorithm is trained to identify edge defects, which is deployed to the D905 camera as a job.

The machine can be connected to the host with SECS/GEM, providing a Pass/Fail result for each wafer in the Lot.

Defective wafer images are displayed on the user interface for analysis, if required.

With a typical cycle time of 3 minutes for a Batch ID Read and Batch Inspection, the machine can process up to 500wph with reading and
1500wph for edge inspection only.

Some examples of energy savings are the eYR-8030SC(LN) is enabled to provide additional 50% energy savings during idle via process tool commands.
This model also requires 9.8LPM (2.6gpm) LESS facility cooling water resulting in 588 less liters (155 gallons) per hour or 14,110 liters (3,728 gallons) per day or 5.1 million less liters (1.3 million gallons) required per year when compared to the previous generation model! The eYR-8030SC(LN) and eYR-8030SC(HP) are designed to have either model stacked upon the other while the eYR-9030SC(LP) is designed to have either the eYR-8030SC(LN) or the eYR-8030SC(HP) stacked upon it for footprint savings. For further footprint savings, two single channels can be combined into a dual-channel unit.

Product Features:

Touch Panel Features for ease of operation and monitoring status

• Remote / Local Operation Selectable
• Run / Stop Operation Selectable and Status Display
• Alarm Monitor
• Control Temperature Setting
• Coolant Pressure Display and Adjustments
• Displays Coolant Temperatures
• Outlet and Inlet Temperatures
• Controlled and Set Temperatures
• Coolant Flow
• Facility Water Flow

For more Information: Click Here !!!

Flowell Corporation, a leading manufacturer of compact fluid components for semiconductor manufacturing equipment. With a specialization in Tube Fittings, PFA/PTFE Tubing, Valves, Fluorocarbon Resin Pliant Tube and Tooling for a wide range of chemical solutions. Our products are designed to meet the highest industry standards and ensure optimal performance in your applications.

Product Information:

Tube Fitting

F20/F20A Series, Ring Insertion tool

• Excellent chemical resistance.
• Smooth liquid flow.
• Withstands high temperature: max temp of 200°C. 
• Does not come off.
• Repeatable fitting makeup.
• Compact design.
• More Information: Click Here !!!

F30 Series

• Excellent chemical resistance.
• Compatibility with metric- and inch-size tubing.
• Easy assembly.
• Wide variety of models.
• Clean.
• More Information: Click Here !!!

F50 Series

• The 50 series pipe fittings are used for connecting tapered threads for pipes.
• There are two types of threads: R, RC (PT) and NPT.
• Corrosive-resistant fluororesin (PTFE) and SUS316 are employed as the material.
• Wide variety of types.
• All of the 50 series products are made-to-order products.
• More Information: Click Here !!!

F60 Series, Flaring tool

• No seepage.
• Minimal fluid trapping.
• Does not come off.
• Easy to assemble.
• More Information: Click Here !!!

F70 Series, Welding Machine

• New welding system.
• Flat inner welding surface for smooth fluid flow.
• Firm welding.
• Enables work in a small space.
• Compact design and light weight.
• More Information: Click Here !!!

F80 Series, Portable tool

• Maximum operating temperature of 230 °C.
• Does not leak.
• No accumulation.
• Easy assembly.
• Control ring.
• Compact.
• Mounting hole.
• More Information: Click Here !!!

Valve

4600 Series PTFE SHUT OFF VALVE

• All the wetted parts are made of fluororesin (PFA, PTFE), and thus boast excellent chemical resistance.
• All the component parts are made of resin, which are resistant to corrosion and metal elution is also unlikely.
• A special mechanism is employed, so the stem unit does not rotate. This prevents particles from occurring and boasts excellent sealing performance.
• All the shutoff valve products support panel mounting. A rotation stopper has been added to make the product easier to use.

They can also be mounted to a base.

• High-functional tube fittings (20 and 20A series) made of fluororesin are employed for the connections.
• Compared to existing products, the larger orifice diameter offers a larger flow capacity.
• More Information: Click Here !!!

Tube

PFA, PTFE Tubing

• Excellent heat resistance
• Highly non-adhesive, thus preventing fixing and accumulation of fluids.
• Chemically inactive, and thus highly resistant against almost all types of chemical agents and materials, and does not pollute fluids.
• Highly weatherproof, and non-flammable in the atmosphere.
• Extremely stable electrical properties.
• More Information: Click Here !!!

Fluorocarbon Resin Pliant Tube

• Assembled with the 20 series tube fittings, so the tube does not come off. The ends have also been processed to enable easy and hassle-free installation.
• The fluororesin material boasts excellent heat and chemical resistance.
• Boasts flexibility, as well as resistance to aging, degradation and fatigue for reliable use.
• Easy to assemble and disassemble, and supports repeated use.
• Fluid inside is visible through the translucent tube.
• No adhesion and accumulation of the fluid due to its excellent non-adhesive characteristics.
• Spiral structure that does not trap fluid.
• Wavy structure that is highly flexible.

More Information: Click Here !!!