Wuxi Guanya Refrigeration Technology Co.,Ltd.

无锡市,  江苏省 
China
http://www.lneya.com

• Booth: 3018

Overview

(LNEYA) specialized in the Industrial Chiller, Industrial Refrigerator, Multi-reactor Chiller (TCU), Battery Motor/Semiconductor Temperature Testing System and Ultra-low Temperature Chiller. Used in pharmaceutical, aerospace, semiconductor, new energy automotive battery / motor and other industries. The temperature control range of the product is wide, and the -152°C~350°C can be perfectly realized.

At present, the company is at the advanced level in the same industry in the research and development of single-machine cascade refrigeration technology, and the research on high and low temperature rapid temperature rise and temperature technology is at the international advanced level. In particular, the high-precision temperature control of the reactor is an internationally advanced single medium control -90 °C ~ +250 °C continuous temperature control, and high precision linear control of the reactor material temperature.

  Press Releases

• Semiconductor Process Integrated Circuit Etching Chiller (Mar 13, 2024)

  In the semiconductor manufacturing process, in addition to eliminating external pollution sources, integrated circuit manufacturing steps such as high-temperature diffusion and ion implantation require wet cleaning or dry cleaning. Dry and wet cleaning effectively uses chemical solutions or gases to remove dust, metal ions and organic impurities remaining on the wafer without damaging the surface and electrical characteristics of the wafer.

  The IC process requires the participation of some organic and inorganic substances. In addition, the production process is always carried out in a clean room with manual participation, which inevitably leads to various environmental pollution of silicon wafers.

  A Semiconductor Chiller is a competent cooling machine for removing heat produced by exothermic processes in semiconductor industries. It utilizes a quality coolant to transfer heat, which can be later dissipated to the environment.

  A chiller (thermostatic water circulator) is a device that supplies circulating liquid such as water while cooling/heating to a preset temperature. It is used to maintain a constant temperature of heat sources and other objects in facilities and equipment through temperature-controlled circulating water. Chiller is designed to help achieve precise temperature control and transform into the perfect “thermal solution leader”.

  It is widely used in etching equipment, CMP (mechanical polishing), laboratory precision equipment, high-precision testing instruments, molds, etc. in the semiconductor industry. Reliability testing, such as characteristic analysis, high and low temperature change testing, temperature shock testing, failure analysis, etc. For example: chips, microelectronic devices, integrated circuits (SOC, FPGA, PLD, MC U, ADC/DAC, DSP, etc.) flash memory, UFS, eMMC, PCB, MC, Ms, MEMS, IGBT, sensors, small module components and light Communications (such as transceiver high and low temperature testing, SFP optical module high and low temperature testing, etc.), other electronic industries, aerospace new materials, laboratory research, etc.

  Compact structure, mobile design; touch screen operation, fast DUT temperature stabilization time; temperature up to ±0.5 ℃. The entire system is a fully closed system, with no oil mist at high temperatures and no moisture in the air at low temperatures. The system will not be pressurized due to high temperatures during operation, and will automatically replenish the heat transfer medium at low temperatures.

  URL: https://www.lneya.com/news/industry-news/semiconductor-process-integrated-circuit-etching-chiller.html

  Email: [email protected]

• Recirculating Chiller For AOI System Of Semiconductor Automatic Optical Testing Equipment (Mar 13, 2024)

  Semiconductor metrology is crucial in semiconductor manufacturing processes. The complex properties of semiconductor manufacturing now require multiple testing stages between processing steps. The testing of thin film semiconductor chips uses several techniques, including elliptical polarization method and reflection method. Precision optical equipment is used for defect detection and precise size measurement. Manufacturers of optical detection systems must integrate thermal solutions to stabilize the temperature of optical components. Thermal noise can affect the imaging system by reducing the quality of image resolution. Thermal noise fluctuations can also shorten the service life of thermal sensitive components, leading to downtime of detection systems and semiconductor manufacturing processes. Equipment downtime may result in manufacturers losing millions of dollars in revenue.

  The demand for higher throughput, higher packaging density and repeatability, as well as high-speed optical measurement systems, is placing increasing demands on thermal management systems associated with measuring tools. In addition, the lack of precise temperature control will lead to incorrect data, incorrect decisions, conclusions, and significant production losses.

  Regardless of the type of automatic optical detection method, strict temperature regulation is required to ensure the normal performance and long-term operation of optical components. Many modern semiconductor automatic optical detection systems, such as ultrasound, now use lasers as a source of testing speed and accuracy. If the light source is a laser, it naturally generates heat during operation and must be precisely cooled to maintain the desired wavelength. The laser will produce pulsation with temperature changes, which affects the testing accuracy.

  According to the design of Automatic Optical Inspection (AOI) tools, the system may include multiple imaging sensors to create high-quality 3D images. The imaging sensor must be kept below room temperature, with a temperature stability of ± 0.5 ° C or better. Accurate temperature control is required to maintain the stability of imaging sensors and maintain high image resolution. Cooling laser optical components and critical components also helps to increase equipment lifespan, reduce maintenance, and lower total cost of ownership by extending mean time between failures (MTBF).

  Semiconductor Automatic Optical Inspection (AOI) systems typically require removal of up to 100 watts or higher power, with temperature stability of 20 º C or below and stability greater than 0.01 ° C. Many semiconductor automatic optical detection systems operate around the clock. A key requirement for cooling systems is high reliability and the shortest downtime. The cooling system must maximize equipment life, reduce maintenance, and lower total cost of ownership by increasing the mean time between failures (MTBF). This is combined with temperature stability in temperature control to achieve the strictest possible tolerance.

  URL: https://www.lneya.com/news/industry-news/recirculating-chiller-for-aoi-system-of-semiconductor-automatic-optical-testing-equipment.html

  Email: [email protected]

• Which Type of Chiller Can Be Chosen for Cooling XRD? (Mar 13, 2024)

  The advantages of collecting single crystal X-ray diffraction data at low temperatures have long been recognized by the scientific community. The use of cryogenics has increased substantially in recent years with the availability of effective and reliable equipment and publications.

  During the working status, X-ray tube generates a large amount of heat and needs to be cooled and protected by a cooling circulating water chiller. Without a chiller, the tube would overheat, leading to a multitude of issues including, eventually, tube failure . Usually requiring a low heat load of 5-8KW, cooling systems must provide precise temperature control for X-ray detectors to ensure maximum tube protection and longevity.

  LNEYA FL series cooling system is environmentally friendly and suitable for advanced laboratory equipment. It is your best partner when looking for laboratory equipment. RG chiller and X-ray diffractometer (XRD), X-ray fluorescence spectrometer (XRFS), large field emission electron microscope, plasma etching machine, vacuum coating equipment, ion coating equipment, vacuum furnace, industrial furnace and other high-heat generating equipment Perfect match for industrial equipment. In addition, the RG series can also be used as a central chiller to meet the requirements of multiple instruments at the same time.

  Featuring a closed cooler loop, it allows continuous, uninterrupted research and production at temperatures from -25 to 40°C. It is suitable for applications where reliable and rapid removal of operating heat is required in chemical production processes or where operating heat is removed from technical systems in harsh, continuously used environments. Unlike tap water cooling, this cooling circulator provides a constant temperature regardless of the time of year and pressure fluctuations. An independent cooling water system replaces the central cooling water supply system and avoids the leakage of environmentally harmful substances. Conserving water also protects the environment and significantly reduces operating costs. Applications include rotary evaporators and Soxhlet systems, analytical equipment such as electron microscopes, X-ray units, refractometers, distillation systems, X-ray control systems such as in airports and semiconductor systems, cooling trap control such as in gas drying, and Central cooling water supply completes the laboratory to replace mains water cooling.

  URL: https://www.lneya.com/news/industry-news/which-type-of-chiller-can-be-chosen-for-cooling-xrd-2.html

  Email: [email protected]

  WhatsApp: 086 13912479193

• Temperature Control Applications In Advanced Semiconductor Industrial Processing (Mar 13, 2024)

  Temperature Control Applications In Advanced Semiconductor Industrial Processing

  Semiconductor manufacturing is a complex and complex process that requires a highly controlled environment. Temperature plays a vital role in the industry, affecting every stage of semiconductor production, from wafer fabrication to assembly and testing. Maintaining precise temperature conditions ensures optimal electrical performance, reduces defect rates, enhances device reliability and increases overall productivity. Advances in technology have led to thermostat-based temperature control solutions that have revolutionized the industry and offer numerous benefits.

  In a study conducted by industry experts, a 5°C decrease in temperature during various stages of semiconductor manufacturing resulted in a 10% improvement in device reliability. Traditional temperature control methods often consume excessive energy due to inefficient cooling or heating processes.

  Temperature control is critical in industrial semiconductor manufacturing due to the extreme sensitivity of the materials and processes involved. Semiconductor devices are manufactured using high-precision technology, and any temperature deviation can have a significant impact on the quality and reliability of the final product. By using a thermostat-based temperature control system, manufacturers can maintain stable operating temperatures throughout the production process and avoid unnecessary changes.

  Every process step in silicon wafer manufacturing depends on the measurement and control of wafer temperature. Processes such as PVD, HDP-CVD and RTP can be improved if wafer temperature is accurately measured and controlled during processing. In RTP, temperature monitoring is particularly important due to high temperatures and the importance of tightly controlling the thermal budget. Especially in the etching process, top dielectric etching, metal hard mask etching, shallow trench isolation trench etching, sidewall etching, shallow trench isolation trench etching, polysilicon etching, edge etching, dielectric etching Etching, photoresist etching, contact hole etching, requires a chiller for process cooling, single channel, double channel or even three channel.

  URL: https://www.lneya.com/news/industry-news/temperature-control-applications-in-advanced-semiconductor-industrial-processing.html

  Email: [email protected]

  WhatsApp: 086 13912479193

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