STI CO., LTD.

** Features **

1. Temperature Gradient Control: Effectively controls the temperature gradient of both raw material and growth portions, critical for PVT growth.

2. Adjustable MF Coil Positioning: Easily adjusts the MF coil position to create a suitable △T for hot-zone growth.

3. Customizable Equipment: Manufactures equipment tailored to each customer's specific growth process requirements.

4. Data Logging: Records all data from the 3-5 day growth process accurately.

5. Optimized Sytem Matching: Ensures optimal matching of MF-Coil, Growing Reactor, and Oscillator through simulation analysis and power control.

6. Safety and Reproducibility: Features a self-developed control system with safety protection for high-value components, offering superior reproducibility and safety in PVT-SiC growth.

** Specification **

1. Temperature: MAX 2,500℃ (2,100~2,400℃)

2. Equipment Size(mm): 4 inch (W1500xD2200xH3500) / 6 inch (W1500xD2500xH4100) / 8 inch (W1650xD2600xH4100)

3. Heating Method: MF Induction Heating

4. Resonant Frequency(kHz): 9~11

5. Power Suuply(kW): 4 inch: 10~15 / 6 inch: 12~17 / 8 inch: 15~20

6. Quartz ID(Inner Diameter): 4 inch: Ø280 / 6 inch: Ø395 / 8 inch: Ø438

7. Reactor Quartz Tube: Single Tube Air Cooling

* Features : Good Transmittance, High Purity Materials, Low OH- Contents
* Product Application Semiconductor parts : Focus ring, Cylinder tube, Photomask substrate, etc.

* Types of Silicon Carbide Powder 

1. Beta Phase SiC Powder

   1) Features

      - Outstanding mechanical properties

      - Thermal Conductivity

      - High Purify Materials

      - Diamater (Size) : 1 ~ 100 μm / Total Purity : 10 ~ 1,000 ppm

   2) Product Application

      - Ceramic Composites

      - High Thermal Materials 

      - Ink Composites

2. Alpha Phase SiC Powder

   1) Features

      - Outstanding mechanical properties

      - Thermal Conductivity

      - High Purify Materials

      - Diamater (Size) : 100 ~ 1,000 μm / Total Purity : 1 ~ 100 ppm

   2) Product Application

      - Ceramic Composites

      - High Thermal Materials 

      - SiC Ingot Source Materials