Precitec 3D Metrology

The Flying Spot Scanner 310 + CHRocodile 2It is a high-performance optical 3D sensor designed for non-contact measurement of TTV, bow, warp, and surface topography in a single scan. It delivers nanometer-level height resolution and sub-micron lateral resolution — ideal for applications in semiconductor and advanced electronics manufacturing.

The system enables full-field measurements across wafer surfaces up to 12", ensuring fast, accurate, and repeatable results. Its robust design and integrated vibration compensation allow for reliable inline and offline use in production environments.

Optimized for transparent, reflective, and structured surfaces, the Flying Spot Scanner 310 combines high throughput with precision. It supports Industry 4.0 integration through standardized interfaces, ensuring easy automation and data connectivity.

The CHRocodile 2D-PS is a compact multipoint sensor combining two chromatic confocal sensors in one housing for simultaneous, high-precision top and bottom surface measurement. This enables accurate two-sided thickness and step-height measurements in a single pass — ideal for transparent and multilayer materials such as wafers, glass, or films.

It delivers fast and reliable inline results with high lateral and axial resolution. The sensor operates maintenance-free and is optimized for industrial environments. Designed for integration into production lines, it supports Industry 4.0 standards for seamless process control and data handling.