The IMS 7f-Auto is the latest version of CAMECA's IMS xf SIMS product line, delivering high-precision elemental and isotopic analysis with enhanced ease of use and productivity. Optimized for complex applications—including glass, metals, ceramics, Si-based, III-V, and II-VI devices—it meets the semiconductor industry's needs for efficient device development and process control.
Renowned for its exceptional depth profiling capabilities, the IMS 7f-Auto excels in dopant monitoring across diverse species and materials. Equipped with high-brightness Cs+ and O2+ ion sources, it offers high transmission and mass resolution for superior performance.
Based on the dynamic SIMS technique, the IMS 7f-Auto achieves excellent detection limits for light elements, providing trace impurity analysis with unmatched sensitivity. Its advanced depth profiling delivers high resolution and throughput, while sub-micron lateral resolution ensures precise uniformity mapping.