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SiCentury Semiconductor Technology (Suzhou) Co.,Ltd

Suzhou,  Jiangsu Province 
China
http://www.sicentury.com
  • Booth: B2424

Welcome to visit our SiC CVD vertical epitaxial equipment.

Overview

Founded in 2020 in Suzhou Industrial Park, SiCentury is a cutting-edge semiconductor manufacturing equipment provider with world-class talent and independent intellectual property rights. With a global vision, SiCentury is committed to establishing the world’s leading platform for key equipment and core technology in semiconductor industry. Our core management and technical experts boast decades of successful experience in R&D and commercialization of high-end semiconductor manufacturing equipment.
SiCentury focuses on R&D, manufacturing, sales, and service of SiC/GaN and other compound semiconductor epitaxy equipment, providing global customers with world-class equipment and advanced technological solutions tailored for mass production and prospective research. Going forward, we plan to expand our portfolio to a wide range of semiconductor equipment.
SiCentury was the first manufacturer in China to realize volume sales of 8” and 6” silicon carbide epitaxy equipment with vertical airflow, which has continued to be used by more than a dozen top industry customers for mass production.


  Products

  • SiC Epitaxial CVD Equipment
    (1)Throughput: ≥1200 wafers/month
    (2)Epi spec: 6/8 inch
    (3)In-wafer thickness unif ormity:≤2%
    (4)In-wafer concentration uniformity:≤3%...

  • (1)Throughput: ≥1100 wafers/month, could reach≥1200wafers/month after optimization
    (2)Epi spec: 6 inch (8 inch compatible)
    (3)Temperature mode: multi zone controlling
    (4)Flow mode: multi zone adjustable shower head
    (5)Rotation speed: 0-1000RPH
    (6)Maximum epi velocity: ≥60μm/h
    (7)In-wafer thickness unif ormity:≤2% (could finetune to within 1%, δ/mean, EE 5mm)
    (8)In-wafer concentration uniformity:≤3% (could fine-tune to within 2%, δ/mean, EE 5mm)
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