Loading...

SOLBERG Vacuum Filtration Solutions

Itasca,  IL 
United States
http://www.solbergmfg.com
  • Booth: B1522

SOLBERG CREATES VACUUM FILTER SOLUTIONS FOR SEMI PROCESSES

Overview

Vacuum systems (pumps, filters, and other auxiliary equipment) are crucial for semiconductor and solar cell manufacturing processes including:  crystal growing, wafer fabrication, Chemical Vapor Deposition (CVD), and lamination.  These processes create by-products ranging from silicon particles to harsh chemical vapors, and when not captured, these contaminants will negatively impact the overall system performance and damage critical components, including the vacuum pumps. 

Solberg creates high-efficiency vacuum filtration solutions designed for specific semicon process requirements.  Purpose built filtration solutions will capture process contaminants, protect the vacuum pump, reduce maintenance costs, and maximize semiconductor tool uptime and product yields.  

  Press Releases

  • Solberg, a trusted leader in silencing, filtration, and separation since 1968, brings over 50 years of expertise in providing filtration solutions for the semiconductor industry. Our vacuum technology, including pumps and filtration components, plays a vital role in semiconductor, microelectronics, and solar cell production by addressing contaminants that can damage system components and reduce efficiency. Solberg's solutions maximize Overall Equipment Effectiveness (OEE) by protecting vacuum pumps, lowering maintenance costs, and boosting tool uptime and product yields.  We welcome the opportunity to discuss how our solutions can meet your unique needs and enhance your processes. Visit us at Booth B1522 to learn more about our tailored solutions for your process needs.

  Products

  • WL Series: Medium to High Vacuum Filters
    Solberg’s WL Series Vacuum Filters are designed for semiconductor processes with rapid thermal and pressure cycles and is ideal for medium-high vacuum applications....

    • Solberg’s WL Series Vacuum Filters are designed for a variety of semicon processes where rapid thermal and/or pressure cycles create harsh operating conditions. Ideal for medium-high vacuum applications that utilize vacuum furnaces or deposition tools, the WL series comes standard with a variety of vacuum rated flange options and replaceable filter elements that offer superior protection and longevity for the vacuum system.

    Housings in this series are 100% helium leak tested to ensure vacuum integrity and verify leak rates down to 1x10-5 mbar L/s.

    Solberg’s WL Inlet Vacuum Filter Series offers multiple configurations, including:

    High-Efficiency Filtration
    Chemical Adsorption
    High-Temperature Materials of Construction  

  • RST Series: Reverse Pulse Vacuum Pump Filters
    Solberg’s RST Series reverse pulse industrial filter is designed for extreme dust load applications....

    • Solberg’s RST Series reverse pulse industrial filter is designed for extreme dust load applications. Similar to a reverse pulse style bag house, this heavy-duty vacuum pump filter incorporates split-second bursts of pressurized air to create powerful shock waves that clean the filter element. Quick pulses cause particulate accumulated on the filter element to release and collect in the drop-out area of the filter housing. Pulses can be repeated as required and can occur “in-process” because the split-second air bursts have minimal effect on system pressure. Our self-cleaning air filter can be manually controlled or automated based on user preference. (Optional reverse pulse kit available.)

    Solberg’s RST Series: 

    • Extends the service life of your filter element
    • High-efficiency filtration offers enhanced equipment protection 
    • See-through design allows for instant visual inspection 
    • Optional automation allows for easy maintenance
    • Available extended bucket increases capacity

Categories

202 Equipment, General Use
  • Vacuum drying & out gassing Systems
    • 400 Components, Parts & Accessories
  • Filters, Getters, Purifiers, Catalysts for Gases
  • Vacuum System Components & Accessories (optical monitors; Sputtering target fixtures; lubricants; pu
    • 401 Sub-systems
  • Pumps, Vacuum
    • 501 HVAC, Temperature, Humidity, Contamination Control
  • Contamination Control; HEPA Filtering Systems
    • Loading ...

    :
    :


    Legend
    Available Timeslot
    Scheduled Appointment
    Personal Appointments
    Appointment Request
    Blocked Timeslot
    Restricted Timeslot
    Cancelled
    Declined
    For Technical Support with this webpage, please contact support.