The Semcon 2500 is a tri-axis, fully automatic, cleanroom-rated plating tool for deposition of electroless nickel, electroless palladium, immersion gold, immersion palladium, and immersion silver chemistries. The system processes wafers from 50 – 200 mm using custom or commercially available wafer cassettes.
The Semcon 2500 offers ease of operation with multiple programming options, easy changeovers, with convenient maintenance access all in a space-saving and highly reliable tool.
Features
• Tri-axis cleanroom grade automatic hoist with dynamic scheduling software
• Rotomolded tanks designed with rounded corners for reduced plateup
• Independently adjustable flow controls in processing cells and reservoirs
• Multi-recipe management system with data logging for traceability
• Chemical dosing and filling system with programmable mixing sequences
• Choice of custom or industry-standard wafer cassettes
Benefits
• Turnkey process available including analytical controllers, chemical dosing, and Technic Elevate electroless and immersion chemistries.
• Fully compatible with all Technic Elevate chemistries which reduce time and costs by being able to quickly establish optimum process parameters and efficient control systems.
• Space-saving configurations – process cells configured in two rows vs. single row which results in a slightly deeper but much shorter tool. Fully maximizing valuable cleanroom floor space.
• Extended bath life – rotomolded rounded corner tank design extends bath life by preventing excess plate-out on sharp corners and irregular surfaces.
• Wafer size processing flexibility (50 – 200 mm)
• Reliability and value – designed, fabricated, and installed by an experienced industry leader in electroless and immersion production plating.