Innospectra (Asia) Pte Ltd

The SMP Software captures data from SCS workstation, equipment and ESD event continuous monitors and provides a real-time picture of critical manufacturing processes . It monitors the following parameters with real time data and alerts :

• Operator Body Resistance 
• Operator Body Voltage 
• Soft (ESD Mats) Ground Resistance 
• Metal / Tool Ground Resistance  
• EMI voltage (high frequency noise in ground lines) 
• ESD Events (both quantity & magnitude of events)
• Static voltage 
• Ionization Parameters (offset voltage & decay time)  

It is based on the CRDS (Cavity Ring-Down Spectroscopy) technology with following advantages :

• Dramatically Improved Speed of response 
• Drift free 
• No calibration is required
• Has a display on the front panel so you can see the exact value & plot without having to use additional monitor to see
• You can access & make all the settings on the user friendly front panel
• Reliable data as the readings do not get compromised by VOCs in the environment  
• NH3 Range 0 to 1ppm, LDL of 40ppt ; HCL Range 0 to 4ppm, LDL of 100ppt ; HF Range 0 to 40ppm, LDL of 300ppt

It is the next generation of Trace analyzers for detection & continuous monitoring of Airborne Molecular Contaminants in Semiconductor Cleanrooms, FOUP Cleaning Tools, Reticle Nests & Sub-Fab Environments   

Besides ESD Audits, Surveys & Testing we also provide the following ESD related services :

• Developing, Preparing & Managing a ESD Control Plan & Program per ESDA S20.20 (or IEC61340-5-1)
• Static Control / ESD training 
• Advanced testing that includes assessment / evaluation of process tools / Automated Handling Equipment (AHE) - including measuring & locating ESD events
•  To perform Static (ESD) Materials testing per ESD standard  (STM11.11, 11.12, 11.13, etc) at site environmental conditions 

All our testing is supervised by a TR53 Trained technician and overseen & certified by a iNARTE Certifed ESD engineer and a ESDA Certified Professional Program Manager . We follow the ESD Association standards which are globally recognised for all the proposed testing & audits . 

• One of it’s kind – Patented Quadpoint nozzle innovative design  
• Steady State DC Ion Emission (with air assist)
• Ion Balance of ±5V per ANSI/ESD SP3.5
• Able to meet ANSI/ESD S20.20 < ±35V Ionizer Balance Specs
• Output is adjustable using a IR remote  
• With Single Crystal Silicon Emitter Points
• Available in lengths of 350mm, 590mm, 770mm & 860mm
• No switching voltage peaks as evident in AC Technology type ionizers
• Suitable for Installation within Semiconductor Tools processing Advanced Packaging ESD Sensitive devices