Fast Response Mass Flow Controller [MC-7000]

Achieves high-speed flow control of 200msec (typical) by using a thermal sensor. By using the Lintec’s unique non-contact, thermal flow rate sensor and piezo control valve, it’s possible to control the flow of corrosive gases with ultra-high speed.

This product offers ±1.0% S.P. high accuracy flow rate control, and has DeviceNet or EtherCAT digital communication interface available for selection.

Feature

• Ultra high-speed flow control 200msec
• Accuracy ±1%S.P.
• Operating temperature 5 to 50°C
• Metal seal
• Clean (zero particle structure)
• Ambient temperature sensor
• EtherCAT communication
• DeviceNet™ communication

Example of Use

High-speed etching process

In semiconductor manufacturing process, there is a need to improve the throughput in parallel with miniaturization. Even for mass flow controllers that control the flow rate of reactant gases, there is an increasing demand for shorter flow rate control start (rise) times. The ultra high-speed mass flow controller [MC-7000] is a non-contact thermal flow sensor that does not contact the flow sensor and the flow measuring gas and achieving an ultra-high-speed response of 200 msec. Since it is a non-contact type, high-speed flow rate control is possible for measuring the flow rate of corrosive gases.

EtherCAT Mass Flow Controller [MC-5000C]

High performance EtherCAT mass flow controller for semiconductor processes. It is compliant with SEMI standards and can be controlled by using the EtherCAT communication, which is used to speed up the transport system of semiconductor manufacturing equipment.

This MFC has a full metal seal, which is a requirement in most semiconductor manufacturing processes, and Lintec’s unique ambient temperature compensated flow rate sensor; liquefied gas operations are also possible with the “liquified gas” option.

Example of Use

Communication Unification of EtherCAT Communication Devices

EtherCAT communication (digital interface) is increasingly used in semiconductor manufacturing equipment for high-speed control of robot arms and other transport systems. 65,536 nodes are available for EtherCAT communication, enabling unification of all measurement and motion elements of the MFC with EtherCAT communication.

High Performance Liquid MFC [LC-3000L]

A liquid mass flow controller which integrates a thermal liquid flow rate sensor and a high precision piezo actuator valve.

By measuring the current mass flow rate with a liquid mass flow sensor and controlling the opening degree of the piezo valve with the feedback, it is possible to automatically control the liquid mass flow rate at high speed.

Feature

• Micro flow liquid control
• Accuracy ±1% F.S.
• Clean (zero particle structure)
• RS-485 communication

Examples of Use

Continuous control of micro flow rate without pulsation

Although metering pumps are convenient products that can flow a fixed amount of liquid, due to the moving parts they are subject to pulsation. Lintec’s liquid mass flow controllers are capable of stable flow control without pulsation as long as they are pressurized at an appropriate and constant pressure.

Liquid Control to Vacuum Equipment

If a metering pump is applied for flow control under downstream vacuum conditions, liquid tends to escape, making it hard to control the flow control. The liquid mass flow controller (LC-3000 series), which integrates a control valve and mass flow sensor, can control the flow rate regardless of the secondary pressure as long as the specified differential pressure conditions are met.

Compact heat exchanger [HX-0050A]

VU-462 is remarkable for maximum 300℃ operating temperature, enlarged vaporization chamber compared to VU-550, increased heater power and extended vaporization outlet distance.

Leak stable performance at high operating temperature is achieved by implementing metal seals.

The vaporization chamber is larger compared to the conventional products, and the vaporization efficiency is optimized even at high flow rates. The vaporizer is also equipped with a 240V / 2400W heaters, which have the highest power output among Lintec vaporizers.

There are three valve options available for this vaporizer: piezo, solenoid, and valveless.

Feature

• Compact design (158 mm x 80 mm x 80 mm)
• Maximum flow rate 50SLM
• Maximum operating temperature 200°C
• Capable of heating gases that do not corrode the gas contacting material (SUS316L)
• Can be used under vacuum or pressure

Examples of Use

Dilute N2 heating  the heating dilute N2 before introducing into the pipe abatement equipment

The exhaust lines of semiconductor manufacturing or FPD manufacturing tools often subject to clogging when the reaction gas adheres to the piping before moving on to an exclusion device. Therefore, it is common to dilute it with high temperature N2, but heating the gas with a tape heater from the outside of the piping is not sufficient enough. The compact heat exchanger (HX-0050A) heats the fluid sufficiently to minimize the clogging build-up risks.

Liquid Vaporization System [LVS Series]

The LVS series is a compact liquid vaporization feeder that uses a liquid mass flow controller and a vaporizer. As a manufacturer of fluid measurement and control equipment, the LVS series can supply liquids more stably than a bubbling unit and can handle higher flow rates and ambient pressure than a baking unit, thanks to a flow system that is tailored to the physical properties of the liquid.

Feature

• All-in-one design for easy liquid vaporization supply by simply connecting various utilities
• Various specifications are available depending on the liquid properties, supply volume, and operating environment.
• Clean structure for easy maintenance
• Various alarm functions for safety

Application

The LVS series is mainly used in research and development applications for various liquid materials, providing vaporization supply of liquid materials used in the deposition processes such as chemical vapor deposition (CVD).

Examples of Liquid Material Applications

C2H5OH / C6H14 / C6H14 / C6H14O3 / C14H32OSi / (CH3CH2)2NH / H2O / HMDS / HMDSO / SiCl4 / TEOS / TiCl4 /acrylic acid

*It is also possible to apply liquid types other than the above depending on the conditions. Please contact us for more details.