Akribis Systems

Product Features
1. Self-produced high rigidity air bearing guide (patented technology)
2. The bi-direction positioning accuracy of 300mm stroke is ±0.15μm
3. 300mm stroke flatness < ±0.75μm
4. High load, maximum load 40kg, high acceleration, maximum acceleration 2G
5.Suitable for wafer inspection、single point diamond turning、laser micromachining, etc

Application
1. No sliding friction for greater stability, suitable for wafer inspection, such as uniform scanning or dynamic following scenes.
2. Using self-developed high-rigidity gas float slider, the maximum load can reach 40kg, can be compatible with more load requirements, to meet the adaptation of various sizes of wafer inspection processes.
3. It can achieve sub-nano level repeated positioning accuracy, break through the structural shortcomings of linear guide rails, meet the needs of more advanced detection processes, and bring higher added value to the equipment.
1. Single point diamond lathe, to achieve nano-level precision processing, reduce grinding process widely applied in the processing of OK mirror, intraocular lens and other industries.

Product Feature

1.Contactless operation between stator and rotor
2.Zero stiction
3.Rotation precision nanometer level, repeatability less than ±1arcsec
4.Speed ripple as low as 0.03%

Application

1.Optics: Optical detection, optical communication, optical alignment, precision laser processing, etc.
2.Semiconductor: Wafer inspection, wafer alignment, wafer grinding/thinning machines, etc.
3.Measurement: Roundness gauges, eccentricity gauges, etc.
4.Assembly: Precision concentric assembly and clamping.

Product Features

1.Compact structure
2.Direct drive technology
3.High precision optical encoder
4.High response
5.Flexible standard design

Application

It can be used in semiconductor, optical, medical and automation fields. It is suitable for optical assembly and inspection, optical fiber alignment and optimization, sensor testing and validation and other application scenarios.

Product Features

Use cross roller guides
1.Coreless linear motor, moving magnet structure design, easy cable management
2.Magnetic balance Z-axis module, stable gravity compensation within stroke range, no additional power supply or compressed air required
3.High precision: repeated positioning accuracy ±0.3μm, straightness ±2.0μm, flatness ±2.5μm
4.Compact size, fast response

Application

Suitable for typical scanning or point-to-point applications in semiconductor, industrial or research markets for metrology, sensor testing and calibration, alignment, and pickup and placement assembly. It can also be used for precision laser processing, laser cutting, optical focusing, wafer testing, surface roughness testing and other industrial and scientific research projects requiring high precision.