ProSys designs and manufactures megasonic systems for wet process technologies, serving OEMs and end users to enhance performance at lower cost of ownership.
Leveraging a robust patent portfolio, our products offer superior uniformity and precision at the nanometer scale, coupled with unique process optimization insights.
Established in 1996, their headquarters are in Campbell, CA with Semiconductor Technologies Singapore being the sales and service partner for Southeast Asia.
ProSys patented “focused acoustic energy” Technology: Significantly more efficient bevel cleaning
- No wafer-to-wafer contamination
- No risk of damage or chipping to the wafer bevel
- Localized application of cleaning process = Low fluid consumption
- No consumable – no preventive maintenance
- Alternative to brush systems
- Compatible with a wide range of process chemistries