GfG Gesellschaft für Gerätebau mbH

D-ReX: State-of-the-Art Gas Detection for the Semiconductor Industry

The D-ReX offers enhanced safety for applications involving toxic, corrosive, or combustible gases. This versatile system provides three monitoring options:

• Diffusion for point-of-use (PoU) monitoring

• External sensors for hard-to-reach areas or pipelines up to 1,200 meters from the point of installation (PoI)

• Integrated pump for sampling gases from other rooms or closed pipe systems (PoS)

For chemically inactive or highly toxic gases such as NF₃, which require a pyrolyzer, the Py-ReX can be used as an extension.

The D-ReX features Power over Ethernet (PoE) and optional LonWorks for seamless integration, and a full-color display. The smart, pre-calibrated sensors are integrated into reusable cartridges, which can be quickly and easily replaced. They support the detection of more than 60 toxic and combustible gases, as well as oxygen. The Bluetooth-enabled app simplifies maintenance, reducing downtime and costs.

Additionally, the D-ReX is equipped with internal relays and can be expanded with a relay module for enhanced security measures. With support for various communication standards—including LAN, Modbus (RS-485), and analog (4-20 mA) integration—the D-ReX ensures reliable data transmission and monitoring flexibility.

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Py-ReX: Advanced Pyrolyzer Module for Gas Detection

The Py-ReX extends the capabilities of the D-ReX PoS gas detection system, enabling the measurement of highly toxic or electrochemically inactive gases. Using filament pyrolysis, the Py-ReX breaks down these challenging gases into detectable components, ensuring compliance with stringent quality standards in semiconductor manufacturing and other industrial applications.

It seamlessly integrates with the D-ReX PoS, which uses its integrated pump to channel gases through the pyrolyzer before measurement.

Pyrolysis works by heating a filament inside a quartz glass tube, decomposing target gases into measurable forms—an essential process for gases that cannot be detected directly. The Py-ReX enables the detection of fluorine-based gases, such as hexafluorobutadiene and nitrogen trifluoride (NF₃), while also supporting the measurement of certain inert gases.

Key Features:

• 4-20 mA communication for seamless integration
• Heating current monitoring for enhanced process control
• DIN rail mounting for easy installation

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