Inspired by the rapid further development of microelectromechanical systems and MEMS, Polytec presents this highly innovative product line of microscope-based measurement systems.
MSA Micro System Analyzers from Polytec validate dynamics and topography of microsystems reliably with utmost precision whether in the Kilohertz range, now for up to 8 GHz!
Determine transfer functions, use unique all-in-one instruments for both the static and dynamic 3D characterization of microsystems, measure and see through Si encapsulations and integrate your test-setup into (vacuum) probe stations.
Highlights
- IR capability to measure MEMS dynamics through different layers of Si-capped devices
- Real-time out-of-plane response measurement up to 8 GHz (w/o post-processing)
- Sub-picometer out-of-plane displacement resolution
- Straighforward FE model validation of MEMS in final state
- Superior separation of the individual device layers
- Stroboscopic video microscope to measure in-plane motion up to 2.5 MHz
- Automated system that integrates well for production (probe station compatibility)
- Import / export options for FE model validation