scia Systems GmbH

Chemnitz,  Germany
http://www.scia-systems.com/
  • Booth: B1631

Empowering Nano Precision with Ion Beam Technologies

Overview

Founded in 2013, scia Systems is a technology leader in thin-film process equipment based on advanced ion beam and plasma technologies. The systems are used for coating, etching, and cleaning processes with nanometer resolution and have been successfully implemented in various high-tech industries worldwide, including microelectronics, MEMS, and precision optics industries.

Due to their modular design, the systems are suitable not only for high-volume industrial production but also in development environments, such as cluster configurations.

Expertise in microelectronic manufacturing: Coating | Etching | Cleaning

scia Systems provides technologies and process equipment for various microelectronic applications:

  • Smart sensor technology
    e.g., biotechnology sensors, lab-on-chip systems, GMR, TMR, IR sensors
  • High-frequency electronics
    e.g., BAW, SAW
  • Cost-efficient power electronics
    Advanced Silicon & beyond
  • System Integration by Advanced Electronics Packaging
    e.g., multichip packages, SiPs, 3D packaging

  Products

  • scia Mill 200
    System for full surface ion beam etching and milling of substrates up to 200 mm. A typical application is the structuring of complex multilayers of various materials....

    • The scia Mill 200 is designed to structure complex multilayers of various materials. Different end-point detection systems can be equipped for exact process control. With its fully reactive gas compatibility, the system enables reactive etching processes with enhanced selectivity and rate. The flexible design of the scia Mill 200 allows it to be adapted as a single substrate version as well as in a high-volume production cluster layout with up to three process chambers and two cassette load locks.

    Features & Benefits

    • Etching angle adjustment with a tiltable and rotatable substrate holder
    • Excellent uniformity without shaper
    • Enhanced selectivity and rate with reactive gases

    Applications

    • Structuring of magnetic memory (MRAM) and sensors (GMR, TMR)
    • Milling of metals in MEMS production (Au, Ru, Ta, …)
    • Milling of multilayers from diversified metal and dielectric materials
    • RIBE or CAIBE of compound semiconductors (GaAs, GaN, InP, …)
    • Production of surface relief gratings (SRG)
    • Ion beam smoothing for reduction of microroughness
  • scia Trim 200
    Ion beam trimming system for high precision surface trimming of wafers, without limitations in film and wafer materials. They were typically used for frequency trimming in the manufacturing of acoustic-electrical devices and post-CMP processing....

    • The scia Trim 200 is used for high-precision surface trimming of wafers without film and wafer materials limitations. Designed for high-volume production, the system has a throughput and maintenance-optimized layout with a semiconductor cassette handling robot that accommodates all standard wafer sizes. In addition, a cluster configuration with two process chambers and two cassette load locks is available.

    Features & Benefits

    • Significant yield improvement
    • High precision and high throughput for low production costs
    • No edge exclusion with electrostatic chuck
    • Sub-nanometer removal with zero base etch function

    Applications

    • Frequency trimming of bulk acoustic wave (BAW) or surface acoustic wave (SAW) filters
    • Thickness trimming of silicon on insulator (SOI), quartz, lithium tantalate (LT) or lithium niobate (LN) wafers
    • Film thickness error or step height correction in thin film head (TFH) manufacturing
    • Dimensional correction of MEMS structures

Categories

202 Equipment, General Use
  • Vacuum drying & out gassing Systems
    • 204 Equipment, Mems
  • Deep RIE etching; Dry etching
    • 205 Equipment, Nanotechnology
  • Equipment, Nanotechnology
    • 207 Equipment, Process
  • Coat; Develop; Resist Processing; Track Equipment
  • Deposition; Chemical Vapor (CVD); MOCVD; PECVD; ALD/REALD; LPCVD; MVD
  • Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment
  • Etching; Stripping; Ashing - Dry and Wet Equipment
  • Ion; E Beam Milling Etching Equipment
    • 401 Sub-systems
  • Plasma Sources; Controls; Monitoring; Diagnosis
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