Changzhou VPTek Semiconductor Equipment Co., Ltd.

Changzhou City,,  Jiangsu Province 
China
http://www.vptek.com/
  • Booth: L3203

VPTEK PHOTOMASK & WAFER AOI

Overview

VPTek is a manufacturer of automatic optical inspection equipment in the semiconductor manufacturing field. VPTek's solutions can meet the demanding defect inspection in the semiconductor wafer and semiconductor mask manufacturing process. Its products are used in the fields of pan-semiconductors, CMOS image sensors, MEMS and RF, serving industry-leading FABs, IDMs, OSATs and foundries. VPTek adheres to the path of localization, independently develops key technologies, fills the gap in domestic high-end inspection equipment, and promotes the development of China's integrated circuit industry.


  Products

  • STORM 3000 PhotoMask defect inspection machine
    STORM 3000 ® for PhotoMask defect inspection, For 180/130nm process technology, Can inspection modes such as DB, DD, SL, etc....

  • STORM 3000 ®   It is the third generation IC Mask defect inspection product of VPtek. After years of continuous testing and improvement, STORM 3000 has been evaluated and recognized by top customers in the industry. STORM 3000 is based on advanced laser imaging technology and high-sensitivity software algorithms, and can have inspection modes such as DB, DD, SL, etc. It is suitable for Mask Shop and FAB's needs for mask production process, shipment, and regular inspection. For 180/130nm process technology, it has significant advantages such as high precision, high efficiency, and ease of use.
  • Tornado 3000 Wafer defect inspection machine
    Tornado 3000 is for 4 to 12 inch wafer defect inspection...

  • Tornado 3000 is a fully automatic optical inspection equipment launched by VPtek for wafers with sub micron precision of 8 and 12 inches. Based on the mature architecture of Tornado 2000, the imaging resolution of the optical system is continuously improved through further upgrading and optimization of the optical system to meet more stringent process requirements.
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