SVCS Process Innovation s.r.o.

Czech Republic
  • Booth: M348
  • - 4th Floor

Czech Silicon Valley - where traditions meet technology

SVCS Process Innovation is a manufacturer of the batch horizontal and vertical furnaces that are used for production of transistors, integrated circuits and other electronics components in the semiconductor industry, as well as for making solar cells in the photovoltaic industry. The tools can also be used for process development and materials growth in many areas of research including semiconductor, PV, MEMS and other nanotechnology applications

Other SVCS products include various gas source systems like gas cabinets, valve manifold boxes and custom-made gas systems for delivery of the ultra-high purity technical gases, often corrosive, flammable, pyrophoric or toxic.  The typical applications of the gas cabinets in the photovoltaic and semiconductor industry are ammonia, silane, nitrogen, oxygen and other high purity gases. Furthermore, various precursors delivery systems that brings liquids to the process in the form of vapor – typical example is TMA – trimethylaluminium - Al2(CH3)6 – nowadays widely used for increasing solar cell efficiency. Other famous applications for high purity liquid delivery systems are known like DCS, TCS, TEOS etc.


  • Diffusion furnace
    Horizontal and vertical thermal reactors...

  • HTRs and VTRs are for thermal processing of silicon wafers with addition of gases. Wafers are placed into the process tube in batches of multiple wafers which are loaded, processed and unloaded from the process tube. Process tube is inserted and fixed in heating element. Heating is divided into independent zones to control desired temperature profile along wafer load. Process gases are fed into process tube. Automatic gas system controls flow of process gases. Design and construction follows requirements placed on ultra high purity system (UHP) to prevent contamination of the process. Wafers are placed on boats for processing. Boats are transported in and out of the tube by motorized boat loader. Cantilever concept prevents particle generating mechanical contact. Process is driven by recipes executed by electronic control system. Cascaded adaptive self learning PID temperature control use both fast response spike TCs and slow response profile TC near wafer load.

  • Gas cabinets
    Gas delivery system for uninterrupted delivery of the ultra high purity compressed or liquefied gases...

  • SVCS gas cabinets are manufactured from UHP weld fittings and face seal type connections, tubing, pressure regulators and springless shut-off diaphragm valves,  and other flow components, that are manufactured from SS316L, refined by secondary remelt (VIM/VAR), electropolished to Ra 10 max or better, cleaned, assembled and packaged for high purity semiconductor applications. Particle filters, with all-metal sintered media, for a minimum of five years use, removing more than 99.9999999% of most penetrating particles according to SEMI F38-0699 test method (LRV=9) and purifiers to decrease the chemical contamination of the media to ppb level can be optionally used. All the gas panels are cleanroom assembled and helium leak tested. The state-of-the-art control system with touch screen multi-language display can be interfaced to a control room or a shut-down system.

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