DSF known for high quality, dependable products.
We are a recognized leader in the design and manufacture of Diffusion Furnace Chambers for wafer fabrication. Our offerings of standard gauge chambers, from 400 degC - 1350 degC; Low Mass/Fast Ramp Chambers temperature ranges from 200 degC - 1250 degC Speciality chmabers to 1750 degC are available. We also provide Direct Replacement Horizontal and Vertical heaters for TEL / Kokusai / ASM / Aviza / SVG Thermco, as well as Torch elements, Vestibule Blocks and Soft Collars. We can provide a refurbishment service on select vertical elements at a greatly reduced cost as well.