Elemental Scientific, Inc.

Omaha,  NE 
United States
  • Booth: N868
  • - 4th Floor

Elemental Scientific welcomes you to Semicon Taiwan! #2349

Visit Elemental Scientific at Booth 2349, 1st Floor, to discuss:

Real-time ultra-trace metal monitoring system


Elemental Scientific offers real-time monitoring of semiconductor process chemicals and ultrapure water (UPW) is vital to provide the information needed to improve manufacturing processes and maximize product yield. Metal impurities are monitored in process chemicals at delivery (by tanker or drums), at the central chemical supply, at distribution points, and at the point of use. Chemical monitoring is required 24/7 to verify low or even sub-ppt levels of metal contamination

As organizations look to improve productivity and use real-time data to better understand and improve processes, Elemental Scientific offers the proven scoutDX/ICP-MS system offers several benefits:

  • Immediate detection and notification of metal contamination to:

    - minimize product loss due to accidental contamination

    - allow investigation and elimination of sources of contamination

    - optimize chemical lifetime and reduce cost of disposal and replacement

  • Improved product yield

  • Reduced human contact with hazardous chemical samples, improving safety and reducing manual handling errors

  • Customizable software

Automated Introduction of Pure Semiconductor Chemicals for ICPMS Analysis


Elemental Scientific can explain how our new prepFAST S is an ultraclean automated sample introduction system for direct analysis of high purity chemicals by ICPMS. The prepFAST S uses inline syringe-driven flows of UPW, high purity HNO3 and standard spike to automate sample and standard preparation.

The ICPMS may be calibrated using either external autocalibration or method of standard addition (MSA). Samples are analyzed either undiluted or diluted and with or without inline spiking of high purity HNO3.

Benefits of automated preparation of high purity chemicals include:

  • Direct sampling from PFA bottles to reduce risk of contamination

  • Inline dilution to reduce risk of contamination from manual dilution

  • Minimize safety hazards from handling chemicals

  • Increase productivity automating sample and standard preparation


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