Yongin-si, Gyeonggi-do, 
Korea (South)
  • Booth: L831
  • - 4th Floor

Thank you for your interests in our products and services.

Our main products and services include In-situ Leak Detectors & End Point Detectors. We have sales records over 4,000 products installed and maintained for Semiconductor/Display manufacters including Samsung Semiconductor, Samsung Display and SK Hynix etc. in Korea.

Major application areas are TiCl4, TSN, WN Thin film, W CVD, Ox ALD and PECVD for TEL(TRIAS/-ex), IPS(TECHO300/AKRA/BLUETAIN), LAM(ALTUS), AIXTRON(QXP8300), AMAT(PRODUCER-GT/ iSprint), ASMGK(MIR3000), AKT(5.5G), ULVAC(5.5G).

The SPOES is top product which is dedicated in in-situ leak detection, process monitoring and dry cleaning end point detection. We also have end point detecting  solution, the OPTI L20 is another powerful tool to detect end point for dry etcher and in-situ process monitoring.

We developed all those plasma generating and spectrum analysis techniques by our own expertise of the R&D team. We are proud to say that our technological strengths have been proven through 18 patents registered already and 4 under process.

From the founding in 1993 to current we have been growing steadily and became one of the leading companies in the field of optical measuring and plasma diagnostic solution in Korea.

We look forward to extending our global network meeting the customer demands worldwide.

Please contact us at , , T. 82-2-837-8867  F.82-2-837-8820

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