In response to the diverse demands on flexible array sensors for future smart living, ITRI has developed special structures, such as ladder, based on Digital Lithography (DLG) System. Comparing to existing exposure lithography technology, a unique process by DLG can fabricate a three-dimensional design, e.g. a ladder structure, onto a glass substrate or on a special under-layer substrate without the needs of photo masks. This novel structure offers ingenuities and choices for novel applications such as flexible sensors array.
Thickness of photoresist: 6-7μm, No mask required
Up to 10 layers structure with ladder width ranges from 5 to 40μm