Inspectrology LLC

Sudbury,  MA 
United States
  • Booth: I2409
  • - 1st Floor

Inspectrology provides Metrology and Wafer Inspection system sales and services to Microelectromechanical systems (MEMS), Semiconductor, Compound Semiconductor (GaAs, GaN, SiC, SOI etc), LED (Light Emitting Diode) and Solar Fabs.



We carry a complete line of new and rebuilt IVS Metrology Systems. IVS Metrology systems have been providing reliable, robust measurements to fabs world wide for over 25 years.



Each rebuilt system is expertly refurbished by the engineers who designed them. IVS Metrology Systems feature unsurpassed wafer measurement capability on the toughest layers, CD & overlay measurements in the same recipe and a host of other features. Our engineers employ best practices to completely refurbish and recondition every IVS Metrology System we sell.



Replacement parts for the entire line of IVS Metrology Systems are available at competitive prices. All mechanical parts for the IVS system are rebuilt to new manufacturer specifications in house by our own highly trained IVS system engineers.


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