Imnanotech Co., Ltd.

Suwon-city,  Gyeonggi-do 
Korea (South)
  • Booth: L905
  • - 4th Floor

We are Imnanotech Co., Ltd in Korea

We are Imnanotech Co., Ltd in Korea and we specialize in refurbishing and trading semiconductor manufacturing spare parts, especially MCA and Standard heaters and magnet assembly.

Based on our state of the welding  metalizing technologies, we provide highest level of repair and refurbishing for consumable spare parts (heaters, chucks, magnets etc.); especially, we have special technical expertise in working the surface of heaters(all MCA and Standard heaters’ pucks), which include comprehensive overhauling procedures of cleaning, mechanical and electrical works.

Our refurbishment items are All kinds of  MCA heaters, Standard Heaters, and Magnet assemblies.

We are definitely sure that you could enjoy our state of the art technical services; and customers satisfaction is our highest motto.

We look forward to serving and working for you, and enjoying our mutual business success together.

Thank you very much.

I'm nano tech => Imnanotech co., Ltd. ^^

 Press Releases

  • MCA E-chuck refurbishing

    Magnet Assy refurbishing

    A101, Standard heater refurbishing

    PVD Semiconductor equipment Sourcing


  • MCA ESC Refurbishment & Magnet Assembly
    Sourcing and responding to products in near real time by utilizing our customer database accumulated since its establishment in 2011 ...

  • MCA Heater : Identification of repairs and steps through a close inspection (leak test, working test)

    Electrical part(Improvement of structure, cutting and joining of important parts such as wiring and pole, production of parts (pole, etc.)

    Magnet Assembly is one of the most critical components of coating equipment for semiconductor metal coating equipment (sputter) targets

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