Particle Measuring Systems Inc.

Hsin Chu County, 
Taiwan
  • Booth: L505
  • - 4th Floor

Welcome to Particle Measuring Systems at SEMICON Taiwan.

Particle Measuring Systems Inc. (PMS), a subsidiary of Spectris plc, is a global technology leader in contamination monitoring, the inventor of laser particle counting, and now is the leading provider of solutions for monitoring and controlling many forms of contamination that impact companies that manufacture in ultra-clean environments.


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