Your SEMI Partner with Equipment + Process Expertise
SEMCO is present in the semiconductor market since 1986 and has extensive experience in engineering and manufacturing of mass-production and labortory furnaces for atmospheric and reduced-pressure processing as well as wafer transport automation and software control.
The company's field of competence covers diffusion, oxidation, LPCVD and PECVD. Typiocal applications include LYDOP POCL3 and BCl3 Diffusion, LYTOX Wet and Dry Oxidation, Anneal, Silicon Nitride, Silicon Oxinitride, Poly Silicon and TEOS. To address the challenges attached to scaling from lab scale R&D to pilot line and volume manufacturing, SEMCO proposes the MINILAB platform, an offsite process development and qualification tool covering the complete range of above-named applications.
SEMCO's Electrostatic Chucks offers smart solutions for clamping and processing of thin and ultra-thin wafers based on its proprietary ESC capacitive technology. SEMCO has been designing and manufacturing electrostatic chucks (ESC) and heating pedestals to the wafer processing industry since 1992. SEMCO provides leading OEMs, Semiconductor Fabs, foundries and laboratories worldwide with innovative and efficient wafer handling components as original equipment or retrofit. The company actively manages global support through our subsidiaries and service centers.
SEMCO also specialized in the design and manufacture of mass flow controllers, precision valves and assemblies for the control of liquids and gases used in the fabrication of semiconductor, optical and PV materials.
Horizontal Tube Furances Diffusion, LPCVD and Oxidation 4 Independent Tubes Compatible up to 200mm Best in-class Uniformity Automatic Loading Designed and Made in France
Direct Plasma, Low RF Pin Mark Free, Color Uniform Horizontal Wafer Process Up to 25 wafers per batch Compatible up to 200mm In-situ Cleaning SiN, SiON, a:Si, SiC, SiCxNy
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