Pfeiffer Vacuum Taiwan Corporation

Hsin-Feng,,  Hsinchu County 
  • Booth: J2156
  • - 1st Floor

We provide the perfect vacuum solution!

Vacuum Technology and Vacuum Pumps from the leader

We all need "vacuum for life."

Keeping abreast of the latest news with your smartphone, seeing better thanks to high quality eyeglasses, and discovering the world independently while on the go in your car – these and many other conveniences of everyday living would be impossible without vacuum. Pfeiffer Vacuum offers comprehensive solutions that are indispensable for manufacturing these products.

For more than 125 years, our name has served as a guarantee for high-end vacuum technology, a high quality comprehensive solution, and first-class service. Thanks to close collaboration with our customers and our continuous focus on their needs, we are constantly optimizing and expanding our portfolio. Therefore even in the future, we will always be able to provide our customers with the best possible solution for their particular use. Our service program extends from vacuum pumps through measurement and analysis equipment right up to complete vacuum systems.

Pfeiffer Vacuum has approx. 3,000 employees worldwide and more than 20 subsidiaries. The corporation is listed on the German TecDAX stock index.


  • A 200 L multi-stage Roots pump
    Multi-stage Roots pump for light duty processes with the <br />highest throughput in the integrated pump market<br />...

    • Top performance and unrivaled throughput

    • The lowest footprint of its class and dual inlet position

      allow for easy system integration

    • Energy-efficient and cost-saving

    • High cleanroom compatibility thanks to low noise and vibration levels

    • Integrated self-monitoring system

    • High reliability, no on-site preventive maintenance required

    • Thanks to 100% interchangeability with A 100 L, process performance can easily be increased by replacing the
      A 100 L with the A 200 L

  • A4 series multi-stage Roots pumps
    A4 series dry pumps to address harsh semiconductor and coating applications...

    • High energy efficiency due to multi-stage Roots technology, high efficiency motors and limited use of electrical heaters
    • Wide operating temperature range protects the pump against precursor cracking or condensable deposition
    • High mean time between failures and low cost of ownership
    • High particle tolerance increases tool uptime
    • Extended monitoring functionalities for accurate control of pump operating conditions and idle mode capabilities
    • Semi S2-0712 and UL 61010 compliant
  • ASM 392 mobile high-performance leak detector
    Mobile leak detectors optimized for rapid pump down <br />and short response times on large test objects<br />...

    • 35 m3/h (21 cfm) roughing capacity using frictionless and oil free ACP pump
    • 25 l/s helium pumping speed to shorten the time to test
    • 20 hPa crossover pressure for a rapid entry into measurement mode and additionnal massive mode for large leaks
    • Color touch panel display with full 360° viewing offering excellent visibility
    • Intuitive menu with password protection to prevent from unintended use
    • Available with interface board for automation through an external system (PC or PLC)
  • ATH 1600 – 3204 M turbopumps
    Turbopumps with 5-axis magnetic levitation...

  • Clean vacuum thanks to lubricant-free magnetic bearings

    - Very high gas throughput for all process gases

    - Outstanding long-term stability and reliability

    - High backing pump compatibility

    - High air ingress stability

    - Low lifetime costs due to maintenance-free technology

    - Freely selectable rotation speed in a broad RPM range for optimized process customization

    - Ultra-low noise and vibration

    - Can be installed in any orientation