NISSEI CORPORATION

Tokyo,  Tokyo 
Japan
  • Booth: I3027
  • - 1st Floor

 Products

  • Nanoimprint Foundry
    It is not possible manufacture devices with NIL technology alone. SCIVAX has built a unique nano-foundry platform integrating the unique NIL technology plus other necessary fab technologies....

    • 1. Optical Design and Simulation
    Electromagnetic Analysis Simulation Service
    FDTD, RCWA, BPM, Ray Tracing, etc.
    2. Custom Mold
    From 45nm L&S to a few hundred microns Lens Arrays
    3. Film Deposition/Evaporation
    Various membrane materials
    4. Nanoimprint
    Single-shot Nanoimprint for large area (1100X1300mm)
    5. Etching & Cleaning
    Shape control (Taper, Depth, etc.)
    6. Inspection & Measurement
    Flow detection in Nano-scale structure
    7. Nanoimprint Production Foundry Services
    New factory with the latest facilities for volume production
  • Optical simulation / R&D imprint tool X300
    SCIVAX's optical simulation experts allows us to deliver custom simulation solutions. X300 can be used from RD to pilot run.It's a cheap edtion UV-type Nanoimprint Equipment...

    • * Optical simulation:
    SCIVAX has invested in computer system infrastructure to allow massive computer calculations needed for optical simulation
    ■ Software
        1. FDTD Method Simulation Software
        2. RCWA Method Simulation Software
        3. BPM Method Simulation Software
        4. Ray Tracing Simulation Software
    ■ Hardware
        CPU Xeon 2.6GHz, Max 32 cores
        Memory 512GByte
        InfiniBand (High Speed Network) Connection

    * R&D imprint tool X300:
    Type: UV/Thermal Nanoimprint Equipment
    Transfer method: A collective Nanoimprint
    Transferred material: UV Cure Resin, Thermoplastic Resin, Thermal Cure Resin
    Maximum service temperature: 250℃
    Maximum work size: φ150mm
    Standard work holding mechanism: Vacuum suction
    UV function: Wavelength 365nm, UV irradiation area □100mm

  • Standard mold / Custom mold/ Working mold
    When considering about NIL tech, cost is the biggest problem. Our low cost standard specification molds with the objective of enable speedy initial NIL process tests. We also provide Custom mold and working mold....

    • * Standard mold: 
    we have been continuously providing large full-scale pattern molds (4"～12") which have many inquiries of our prospective. Not only standard molded samples (listed below) but also custom samples can be processed with our service. Please feel free to inquire for the details. 
    From an ultrafine pattern with the leading-edge semiconductor technology, until a pattern of the μm order such as Micro Lens Arrays, a wide variety of NIL molds can be fabricated. 

    * Custom mold:
    According your requests, from evaluation to volume production, various custom molds can be can be fabricated. According to pattern size, SCIVAX uses 7 different mold processes for fabrication. 
    We can fabricate master mold  according to your specification 
    Master Mold Material: Si, Ni 
    Pattern: L&S, Pillar, Hole, etc.
    Pattern Size: 45nm～
    Pattern Area: □10mm～12inch

    * Working mold:
    SCIVAX developed its proprietary working mold technology. 
    SCIVAX can provide customized working molds for customers.

  • Automatic Lift-Off Equipment
    針對晶圓表面難以剝離、容易刮傷或是容易破裂的晶圓，處理方式皆有所不同。Dalton可依照客戶晶圓的狀態，去選擇合適的工藝及規格，提供給客戶客製化的設備。...

    • * 透過Batch式及枚葉式的並用，可更快更確實的完成處理。
    * 透過枚葉處理前的Batch膨潤處理，可得到更佳的處理效果。
    * 透過枚葉處理來縮短處理時間。
    * 與單純枚葉處理相比更不會發生毛邊狀況。
  • Automatic etching equipment
    敝司裝置可依造客戶需求增減Cassette數量,槽內結構，提供客製化設備* 根據客製化狀況，可選配比抵抗計及濃度計;同時具有升降構造，可確保在高溫作業下確保工作人員的安全。...

    • * 根據客戶需求可選擇對應前方、背面、上方等不同搬送機型式
    * 同時兼顧throughput及成本，可依據貴公司的預算提案最合適的產品
    * 可搭載自動門或自動蓋、自動藥液供給、秤量、回収装置。
    * 可搭載晃動機構及濃度管理等機構。常設管路運送規格。
    * 乾燥部可安裝spin dryer、IPA vapor dryer。
  • 横型Spin洗淨裝置
    本裝置可以對應酸鹼藥液洗淨以及微奈米氣泡/洗淨結構的刷子可因應客戶需求提供科學海綿製或是尼龍製(也可選擇軟硬度)...

    • * 自動 or 手動酸堿洗淨裝置
    * 可對應作業尺寸2~12吋。如為方形基板等特殊尺寸可討論
    * 根據客戶生產規模可製作複數Chamber裝置
    * 附有切換排液方式之機能
    * 根據2流體混合噴頭，可以直接使用兩種不同的藥液進行洗淨處理;且可用混合比率之調整後產生之反應熱來進行 藥液升溫，並能直接于作業時噴灑藥液
    * 可以製作附有刷子洗淨機能之裝置
    * 可以製作洗淨光罩之裝置
    * 可以對應洗淨臭氧水(選配)
    * 可以對應洗淨奈米氣泡(選配)
    * 可以將藥液供給,回收元件組裝於裝置本體內，抑或是放置於旁搭配使用
    * 可以於敝司測試中心進行DEMO
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