The Macro Inspection Tool is used in the Semiconductor industry to assess wafer surface quality macroscopically between individual process steps. Using two different illumination methods, the system can quickly detect a broad range of defects that are as small as a few microns in size.
The Macro Inspection Tool detects embedded defects and surface particles, scratches and cracks in layers, residues, or layer in-homogeneities and exposure defects. Advanced illumination techniques ensure an exceptional long lifetime of the illuminators, which guarantees a low cost of ownership.