Innovative Nanotech Inc.

  • Booth: K2876
  • - 1st Floor

SuperSizer sees nano particles in your liquid chemicals

The technology nodes of semiconductor have advanced to 10 nm and 7 nm at an extremely fast speed, and will be 5 nm or even 3 nm in the near future. However, the capabilities of the current particle monitoring technologies can barely monitor particles larger than 20 nm, which lag far behind the industry need. Innovative nanotech in Chroma Group launched an in-line nanoparticle monitoring system, SuperSizer, to "see" clearly, accurately and efficiently the size and distribution of nanoparticles in the sub-20 nm range. SuperSizer is designed to work 24/7 in the strict semiconductor production environment that helps to improve the control of the cleanliness of the wet chemicals, and further the fabrication yield.


  • SuperSizer Series
    SuperSizer can monitor nanoparticles and impurities down to 3 nm...

  • Model Type

    SuperSizer II

    SuperSizer V

    SuperSizer VI




    H2O2 & UPW


    Aerosol Measurement Technology

    Monitor Target

    Particles & Impurities


    Size Distribution

    Sizer Range

    3-64 nm, 4.5-160, 17~1000 (Slurry only)

    Sizer Resolution

    ~ 1 @20nm


    No bubble interference


    Semi S2

    Semi S2

    TS Explosion Proof

    Semi S2

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