SuperSizer sees nano particles in your liquid chemicals
The technology nodes of semiconductor have advanced to 10 nm and 7 nm at an extremely fast speed, and will be 5 nm or even 3 nm in the near future. However, the capabilities of the current particle monitoring technologies can barely monitor particles larger than 20 nm, which lag far behind the industry need. Innovative nanotech in Chroma Group launched an in-line nanoparticle monitoring system, SuperSizer, to "see" clearly, accurately and efficiently the size and distribution of nanoparticles in the sub-20 nm range. SuperSizer is designed to work 24/7 in the strict semiconductor production environment that helps to improve the control of the cleanliness of the wet chemicals, and further the fabrication yield.
Products